Inventor · disambiguated record
Eun-Taeck Lee
Also filed as: LEE EUN-TAECK
2 granted patents·6 pending applications·5 citations·filing 2005–2007
42Inventor score
Top patents by PatentIndex Score
8 records- 0170US8366827B2Chamber inserts and apparatuses for processing a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Feb 5, 2013·5 cites·5 claims
- 0246US2006096541A1Apparatus and method of forming a layer on a semiconductor substrateSEO JUNG-HUN·Filed 2005·Application pending·0 cites
- 0346US2006045970A1ALD thin film deposition apparatus and thin film deposition method using sameSEO JUNG-HUN·Filed 2005·Application pending·0 cites
- 0442US7820244B2Method of forming a layer and method of removing reaction by-productsSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Oct 26, 2010·0 cites·20 claims
- 0541US2008044593A1Method of forming a material layerSAMSUNG ELECTRONICS CO LTD·Filed 2007·Application pending·0 cites
- 0640US2007042132A1Method of forming plasma and method of forming a layer using the sameSEO JUNG-HUN·Filed 2006·Application pending·0 cites
- 0739US2006137607A1Combination of showerhead and temperature control means for controlling the temperature of the showerhead, and deposition apparatus having the sameSEO JUNG-HUN·Filed 2005·Application pending·0 cites
- 0838US2006128127A1Method of depositing a metal compound layer and apparatus for depositing a metal compound layerSEO JUNG-HUN·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →