Inventor · disambiguated record
Eugene P. Marsh
Also filed as: MARSH EUGENE · MARSH EUGENE P
207 granted patents·24 pending applications·5,509 citations·filing 1997–2023
99Inventor score
Files withMICRON TECHNOLOGY INC163MARSH EUGENE P29TWIST BIOSCIENCE CORP15QUICK TIMOTHY A8KRAUS BRENDA D4
Top patents by PatentIndex Score
231 records- 0199US8945305B2Methods of selectively forming a material using parylene coatingMARSH EUGENE P·Filed 2010·Granted Feb 3, 2015·495 cites·18 claims
- 0299US8083953B2Registered structure formation via the application of directed thermal energy to diblock copolymer filmsMILLWARD DAN B·Filed 2007·Granted Dec 27, 2011·99 cites·37 claims
- 0398US10987648B2Functionalized surfaces and preparation thereofTWIST BIOSCIENCE CORP·Filed 2019·Granted Apr 27, 2021·17 cites·20 claims
- 0498US10894242B2Heated nanowells for polynucleotide synthesisTWIST BIOSCIENCE CORP·Filed 2018·Granted Jan 19, 2021·21 cites·19 claims
- 0598US10744477B2Devices and methods for oligonucleic acid library synthesisTWIST BIOSCIENCE CORP·Filed 2018·Granted Aug 18, 2020·24 cites·17 claims
- 0698US10669304B2Methods and devices for de novo oligonucleic acid assemblyTWIST BIOSCIENCE CORP·Filed 2016·Granted Jun 2, 2020·44 cites·20 claims
- 0798US10384189B2Functionalized surfaces and preparation thereofTWIST BIOSCIENCE CORP·Filed 2018·Granted Aug 20, 2019·48 cites·22 claims
- 0898US9981239B2Devices and methods for oligonucleic acid library synthesisTWIST BIOSCIENCE CORP·Filed 2016·Granted May 29, 2018·65 cites·28 claims
- 0998US9895673B2Functionalized surfaces and preparation thereofTWIST BIOSCIENCE CORP·Filed 2016·Granted Feb 20, 2018·61 cites·21 claims
- 1098US7393785B2Methods and apparatus for forming rhodium-containing layersMICRON TECHNOLOGY INC·Filed 2007·Granted Jul 1, 2008·65 cites·20 claims
- 1198US6673701B1Atomic layer deposition methodsMICRON TECHNOLOGY INC·Filed 2002·Granted Jan 6, 2004·223 cites·36 claims
- 1298US6218316B1Planarization of non-planar surfaces in device fabricationMICRON TECHNOLOGY INC·Filed 1998·Granted Apr 17, 2001·314 cites·26 claims
- 1397US8753738B2Registered structure formation via the application of directed thermal energy to diblock copolymer filmsMICRON TECHNOLOGY INC·Filed 2013·Granted Jun 17, 2014·14 cites·25 claims
- 1497US8294139B2Multilayer antireflection coatings, structures and devices including the same and methods of making the sameMARSH EUGENE P·Filed 2007·Granted Oct 23, 2012·47 cites·15 claims
- 1597US7271077B2Deposition methods with time spaced and time abutting precursor pulsesMICRON TECHNOLOGY INC·Filed 2003·Granted Sep 18, 2007·82 cites·64 claims
- 1697US7250367B2Deposition methods using heteroleptic precursorsMICRON TECHNOLOGY INC·Filed 2004·Granted Jul 31, 2007·140 cites·45 claims
- 1797US7160817B2Dielectric material forming methodsMICRON TECHNOLOGY INC·Filed 2001·Granted Jan 9, 2007·99 cites·13 claims
- 1897US6737313B1Surface treatment of an oxide layer to enhance adhesion of a ruthenium metal layerMICRON TECHNOLOGY INC·Filed 2003·Granted May 18, 2004·108 cites·21 claims
- 1997US6677252B2Methods for planarization of non-planar surfaces in device fabricationMICRON TECHNOLOGY INC·Filed 2002·Granted Jan 13, 2004·111 cites·24 claims
- 2097US6617634B2RuSixOy-containing adhesion layers and process for fabricating the sameMICRON TECHNOLOGY INC·Filed 2002·Granted Sep 9, 2003·86 cites·26 claims
- 2197US6462367B2RuSixOy-containing adhesion layersMICRON TECHNOLOGY INC·Filed 2001·Granted Oct 8, 2002·93 cites·24 claims
- 2297US6403414B2Method for producing low carbon/oxygen conductive layersMICRON TECHNOLOGY INC·Filed 2001·Granted Jun 11, 2002·116 cites·7 claims
- 2397US6342445B1Method for fabricating an SrRuO3 filmMICRON TECHNOLOGY INC·Filed 2000·Granted Jan 29, 2002·108 cites·35 claims
- 2496US8551808B2Methods of patterning a substrate including multilayer antireflection coatingsMARSH EUGENE P·Filed 2012·Granted Oct 8, 2013·23 cites·20 claims
- 2596US8409449B2Registered structure formation via the application of directed thermal energy to diblock copolymer filmsMILLWARD DAN B·Filed 2011·Granted Apr 2, 2013·24 cites·17 claims
- 2696US8148197B2Methods of forming germanium-antimony-tellurium materials and a method of forming a semiconductor device structure including the sameMARSH EUGENE P·Filed 2010·Granted Apr 3, 2012·10 cites·18 claims
- 2796US7575978B2Method for making conductive nanoparticle charge storage elementMICRON TECHNOLOGY INC·Filed 2005·Granted Aug 18, 2009·34 cites·78 claims
- 2896US7473637B2ALD formed titanium nitride filmsMICRON TECHNOLOGY INC·Filed 2005·Granted Jan 6, 2009·30 cites·45 claims
- 2996US6541067B1Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide and method of using sameMICRON TECHNOLOGY INC·Filed 2000·Granted Apr 1, 2003·104 cites·43 claims
- 3095US6881260B2Process for direct deposition of ALD RhO2MICRON TECHNOLOGY INC·Filed 2002·Granted Apr 19, 2005·57 cites·80 claims
- 3195US6656835B2Process for low temperature atomic layer deposition of RhMICRON TECHNOLOGY INC·Filed 2001·Granted Dec 2, 2003·68 cites·37 claims
- 3295US6506666B2Method of fabricating an SrRuO3 filmMICRON TECHNOLOGY INC·Filed 2001·Granted Jan 14, 2003·79 cites·3 claims
- 3395US6495458B2Method for producing low carbon/oxygen conductive layersMICRON TECHNOLOGY INC·Filed 2001·Granted Dec 17, 2002·67 cites·8 claims
- 3495US6461909B1Process for fabricating RuSixOy-containing adhesion layersMICRON TECHNOLOGY INC·Filed 2000·Granted Oct 8, 2002·61 cites·20 claims
- 3595US6133159AMethods for preparing ruthenium oxide filmsMICRON TECHNOLOGY INC·Filed 1998·Granted Oct 17, 2000·152 cites·23 claims
- 3695US6074945AMethods for preparing ruthenium metal filmsMICRON TECHNOLOGY INC·Filed 1998·Granted Jun 13, 2000·170 cites·23 claims
- 3794US7560815B1Device structures including ruthenium silicide diffusion barrier layersMICRON TECHNOLOGY INC·Filed 2000·Granted Jul 14, 2009·64 cites·20 claims
- 3894US6660631B1Devices containing platinum-iridium films and methods of preparing such films and devicesMICRON TECHNOLOGY INC·Filed 2000·Granted Dec 9, 2003·62 cites·19 claims
- 3994US6642567B1Devices containing zirconium-platinum-containing materials and methods for preparing such materials and devicesMICRON TECHNOLOGY INC·Filed 2000·Granted Nov 4, 2003·55 cites·45 claims
- 4094US6281125B1Methods for preparing ruthenium oxide filmsMICRON TECHNOLOGY INC·Filed 2000·Granted Aug 28, 2001·71 cites·29 claims
- 4194US6204178B1Nucleation and deposition of PT films using ultraviolet irradiationMICRON TECHNOLOGY INC·Filed 1998·Granted Mar 20, 2001·113 cites·54 claims
- 4293US8225745B2Chemical vaporizer for material deposition systems and associated methodsMARSH EUGENE P·Filed 2011·Granted Jul 24, 2012·5 cites·12 claims
- 4392US9023711B2Methods for forming a conductive material and methods for forming a conductive structureMICRON TECHNOLOGY INC·Filed 2014·Granted May 5, 2015·4 cites·19 claims
- 4492US8741688B2Methods of forming a metal chalcogenide materialQUICK TIMOTHY A·Filed 2012·Granted Jun 3, 2014·10 cites·18 claims
- 4592US6861355B2Metal plating using seed filmMICRON TECHNOLOGY INC·Filed 2002·Granted Mar 1, 2005·39 cites·19 claims
- 4692US6737317B2Method of manufacturing a capacitor having RuSixOy-containing adhesion layersMICRON TECHNOLOGY INC·Filed 2002·Granted May 18, 2004·44 cites·23 claims
- 4792US6517616B2Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxideMICRON TECHNOLOGY INC·Filed 2001·Granted Feb 11, 2003·47 cites·23 claims
- 4892US6323511B1Structures including low carbon/oxygen conductive layersMICRON TECHNOLOGY INC·Filed 1999·Granted Nov 27, 2001·86 cites·26 claims
- 4992US6284655B1Method for producing low carbon/oxygen conductive layersMICRON TECHNOLOGY INC·Filed 1998·Granted Sep 4, 2001·90 cites·15 claims
- 5092US6271131B1Methods for forming rhodium-containing layers such as platinum-rhodium barrier layersMICRON TECHNOLOGY INC·Filed 1998·Granted Aug 7, 2001·93 cites·20 claims
Showing the top 50 of 231 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →