Inventor · disambiguated record
Ewald Wiltsche
Also filed as: WILTSCHE EWALD
3 granted patents·2 pending applications·9 citations·filing 2012–2022
63Inventor score
Top patents by PatentIndex Score
5 records- 0184US9601363B2Thin substrate electrostatic chuck system and methodINFINEON TECHNOLOGIES AG·Filed 2015·Granted Mar 21, 2017·5 cites·18 claims
- 0272US9030797B2Thin substrate electrostatic chuck system and methodWILTSCHE EWALD·Filed 2012·Granted May 12, 2015·4 cites·34 claims
- 0352US10096507B2Thin substrate electrostatic chuck system and methodINFINEON TECHNOLOGIES AG·Filed 2017·Granted Oct 9, 2018·0 cites·30 claims
- 0449US2023317666A1Semiconductor device with metal silicide layerINFINEON TECHNOLOGIES AG·Filed 2022·Application pending·0 cites
- 0531US2016322198A1Ion Source for Metal Implantation and Methods ThereofINFINEON TECHNOLOGIES AG·Filed 2015·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →