Inventor · disambiguated record
Farrokh Ayazi
Also filed as: AYAZI FARROKH
73 granted patents·9 pending applications·1,322 citations·filing 2001–2024
99Inventor score
Files withGEORGIA TECH RES INST53AYAZI FARROKH19CASINOVI GIORGIO2KOHL PAUL A2INTEGRATED DEVICE TECH1
Top patents by PatentIndex Score
82 records- 0198US7767484B2Method for sealing and backside releasing of microelectromechanical systemsGEORGIA TECH RES INST·Filed 2007·Granted Aug 3, 2010·73 cites·29 claims
- 0297US7924119B1Micromechanical bulk acoustic mode resonators having interdigitated electrodes and multiple pairs of anchor supportsGEORGIA TECH RES INST·Filed 2010·Granted Apr 12, 2011·29 cites·7 claims
- 0397US7043985B2High-resolution in-plane tuning fork gyroscope and methods of fabricationGEORGIA TECH RES INST·Filed 2005·Granted May 16, 2006·78 cites·12 claims
- 0496US7639105B2Lithographically-defined multi-standard multi-frequency high-Q tunable micromechanical resonatorsGEORGIA TECH RES INST·Filed 2008·Granted Dec 29, 2009·36 cites·20 claims
- 0596US6909221B2Piezoelectric on semiconductor-on-insulator microelectromechanical resonatorsGEORGIA TECH RES INST·Filed 2003·Granted Jun 21, 2005·192 cites·23 claims
- 0695US7888843B2Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies thereinGEORGIA TECH RES INST·Filed 2009·Granted Feb 15, 2011·29 cites·14 claims
- 0795US7843284B2Lithographically defined multi-standard multi-frequency high-Q tunable micromechanical resonatorsGEORGIA TECH RES INST·Filed 2009·Granted Nov 30, 2010·30 cites·11 claims
- 0895US7543496B2Capacitive bulk acoustic wave disk gyroscopesGEORGIA TECH RES INST·Filed 2006·Granted Jun 9, 2009·84 cites·17 claims
- 0995US7337671B2Capacitive microaccelerometers and fabrication methodsGEORGIA TECH RES INST·Filed 2006·Granted Mar 4, 2008·61 cites·12 claims
- 1094US9003882B1Vibratory tuning fork based six-degrees of freedom inertial measurement MEMS deviceAYAZI FARROKH·Filed 2011·Granted Apr 14, 2015·44 cites·19 claims
- 1194US8061201B2Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscopeAYAZI FARROKH·Filed 2008·Granted Nov 22, 2011·43 cites·14 claims
- 1294US7812692B2Piezo-on-diamond resonators and resonator systemsGEORGIA TECH RES INST·Filed 2007·Granted Oct 12, 2010·37 cites·24 claims
- 1394US7757393B2Capacitive microaccelerometers and fabrication methodsGEORGIA TECH RES INST·Filed 2007·Granted Jul 20, 2010·41 cites·9 claims
- 1494US7360423B2Resonating star gyroscopeGEORGIA TECH RES INST·Filed 2006·Granted Apr 22, 2008·55 cites·22 claims
- 1594US7023065B2Capacitive resonators and methods of fabricationGEORGIA TECH RES INST·Filed 2003·Granted Apr 4, 2006·98 cites·35 claims
- 1693US9318998B1Acoustically-engineered multi-port piezoelectric-on-semiconductor resonators for accurate temperature sensing and reference signal generationGEORGIA TECH RES INST·Filed 2013·Granted Apr 19, 2016·14 cites·22 claims
- 1793US7176770B2Capacitive vertical silicon bulk acoustic resonatorGEORGIA TECH RES INST·Filed 2005·Granted Feb 13, 2007·38 cites·20 claims
- 1892US8450913B1Tunable Piezoelectric MEMS Resonators suitable for real-time clock applicationsAYAZI FARROKH·Filed 2011·Granted May 28, 2013·19 cites·20 claims
- 1992US8166816B2Bulk acoustic wave gyroscopeAYAZI FARROKH·Filed 2009·Granted May 1, 2012·43 cites·31 claims
- 2090US8680752B2Piezoelectric micromechanical energy harvestersAYAZI FARROKH·Filed 2012·Granted Mar 25, 2014·10 cites·33 claims
- 2190US7800282B2Single-resonator dual-frequency lateral-extension mode piezoelectric oscillators, and operating methods thereofINTEGRATED DEVICE TECH·Filed 2008·Granted Sep 21, 2010·25 cites·28 claims
- 2289US8677821B2Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscopeAYAZI FARROKH·Filed 2011·Granted Mar 25, 2014·14 cites·1 claims
- 2389US8528404B2Bulk acoustic wave accelerometersAYAZI FARROKH·Filed 2008·Granted Sep 10, 2013·14 cites·19 claims
- 2489US8405170B2Packaging for micro electro-mechanical systems and methods of fabricating thereofKOHL PAUL A·Filed 2010·Granted Mar 26, 2013·11 cites·23 claims
- 2587US7511870B2Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating theretoGEORGIA TECH RES INST·Filed 2005·Granted Mar 31, 2009·18 cites·21 claims
- 2686US8624471B1Piezoelectric-on-semiconductor micromechanical resonators with linear acoustic bandgap tethersAYAZI FARROKH·Filed 2011·Granted Jan 7, 2014·11 cites·20 claims
- 2786US7933112B2Micro-electromechanical voltage tunable capacitor and and filter devicesGEORGIA TECH RES INST·Filed 2007·Granted Apr 26, 2011·16 cites·17 claims
- 2885US10191079B2Method and system of dual-mode actuation and sensing for real-time calibration of axisymmetric resonant gyroscopesGEORGIA TECH RES INST·Filed 2015·Granted Jan 29, 2019·5 cites·18 claims
- 2984US10393525B2Micro-hemispherical resonators and methods of making the sameGEORGIA TECH RES INST·Filed 2015·Granted Aug 27, 2019·5 cites·16 claims
- 3084US8061013B2Micro-electromechanical resonators having electrically-trimmed resonator bodies therein and methods of fabricating same using joule heatingAYAZI FARROKH·Filed 2009·Granted Nov 22, 2011·12 cites·9 claims
- 3184US7977136B2Microelectromechanical systems structures and self-aligned high aspect-ratio combined poly and single-crystal silicon fabrication processes for producing sameGEORGIA TECH RES INST·Filed 2009·Granted Jul 12, 2011·11 cites·9 claims
- 3284US7847669B2Micro-electromechanical switched tunable inductorGEORGIA TECH RES INST·Filed 2007·Granted Dec 7, 2010·12 cites·22 claims
- 3383US10634499B2MEMS inertial measurement apparatus having slanted electrodes for quadrature tuningGEORGIA TECH RES INST·Filed 2016·Granted Apr 28, 2020·2 cites·14 claims
- 3482US9804190B2Apparatus and method for calibration of capacitance mismatch and temperature variations in a MEMS devicePANASONIC CORP·Filed 2015·Granted Oct 31, 2017·3 cites·6 claims
- 3581US8763441B2Method and apparatus for self-calibration of gyroscopesCASINOVI GIORGIO·Filed 2012·Granted Jul 1, 2014·10 cites·9 claims
- 3681US7859365B2Low frequency process-variation-insensitive temperature-stable micromechanical resonatorsGEORGIA TECH RES INST·Filed 2007·Granted Dec 28, 2010·11 cites·17 claims
- 3780US11137250B2Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope with slanted quadrature tuning electrodeGEORGIA TECH RES INST·Filed 2016·Granted Oct 5, 2021·3 cites·25 claims
- 3880US7847656B2Monolithic thin-film piezoelectric filtersGEORGIA TECH RES INST·Filed 2007·Granted Dec 7, 2010·10 cites·18 claims
- 3979US8022779B2Integrated circuit oscillators having microelectromechanical resonators therein with parasitic impedance cancellationGEORGIA TECH RES INST·Filed 2009·Granted Sep 20, 2011·10 cites·14 claims
- 4079US7056757B2Methods of forming oxide masks with submicron openings and microstructures formed therebyGEORGIA TECH RES INST·Filed 2004·Granted Jun 6, 2006·27 cites·2 claims
- 4176US12407322B2Acoustically decoupled MEMS devicesGEORGIA TECH RES INST·Filed 2023·Granted Sep 2, 2025·0 cites·21 claims
- 4273US11205524B2Integrated atomic beam collimator and methods thereofGEORGIA TECH RES INST·Filed 2019·Granted Dec 21, 2021·3 cites·20 claims
- 4372US11644313B2Substrate-decoupled high-coriolis-coupling pitch/roll gyroscopeGEORGIA TECH RES INST·Filed 2017·Granted May 9, 2023·1 cites·15 claims
- 4472US9917571B2Resonant gyroscopes and methods of making and using the sameGEORGIA TECH RES INST·Filed 2015·Granted Mar 13, 2018·3 cites·29 claims
- 4570US11566898B2Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope with slanted quadrature tuning electrodeGEORGIA TECH RES INST·Filed 2021·Granted Jan 31, 2023·0 cites·15 claims
- 4670US11280612B2MEMS inertial measurement apparatus having slanted electrodes for quadrature tuningGEORGIA TECH RES INST·Filed 2020·Granted Mar 22, 2022·0 cites·7 claims
- 4770US11280613B2MEMS inertial measurement apparatus having slanted electrodes for quadrature tuningGEORGIA TECH RES INST·Filed 2020·Granted Mar 22, 2022·0 cites·5 claims
- 4870US10921123B2Pitch/roll annulus gyroscope with slanted quadrature tuning electrodes and related fabrication methodsGEORGIA TECH RES INST·Filed 2017·Granted Feb 16, 2021·2 cites·20 claims
- 4970US9970764B2Bulk acoustic wave gyroscope with spoked structureAYAZI FARROKH·Filed 2010·Granted May 15, 2018·4 cites·29 claims
- 5070US8519598B1Microelectromechanical resonators having piezoelectric layers therein that support actuation and sensing through a longitudinal piezoelectric effectAYAZI FARROKH·Filed 2011·Granted Aug 27, 2013·3 cites·18 claims
Showing the top 50 of 82 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →