Inventor · disambiguated record
Fang Chen
Also filed as: CHEN FANG · CHEN FANG-CHANG
4 granted patents·1 pending application·26 citations·filing 2001–2011
72Inventor score
Files withTAIWAN SEMICONDUCTOR MFG2CHARTERED SEMICONDUCTOR MFG1JEON BYUNG-GOO1SAMSUNG ELECTRONICS CO LTD1
Top patents by PatentIndex Score
5 records- 0173US6777340B1Method of etching a silicon containing layer using multilayer masksTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Aug 17, 2004·17 cites·26 claims
- 0267US7998869B2Contact patterning method with transition etch feedbackSAMSUNG ELECTRONICS CO LTD·Filed 2008·Granted Aug 16, 2011·2 cites·21 claims
- 0356US8236699B2Contact patterning method with transition etch feedbackJEON BYUNG-GOO·Filed 2011·Granted Aug 7, 2012·1 cites·18 claims
- 0456US7092096B2Optical scatterometry method of sidewall spacer analysisTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Aug 15, 2006·6 cites·22 claims
- 0540US2009014807A1Dual stress liners for integrated circuitsCHARTERED SEMICONDUCTOR MFG·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →