Inventor · disambiguated record
Farhang F. Shadman
Also filed as: SHADMAN FARHANG · SHADMAN FARHANG F
14 granted patents·369 citations·filing 1980–2011
93Inventor score
Files withENVIRONMENTAL METROLOGY CORP4GEN MOTORS CORP2IND TECH RES INST2UNIV ARIZONA2VERMEIRE BERT M2
Top patents by PatentIndex Score
14 records- 0194US7332902B1Micro sensor for electrochemically monitoring residue in micro channelsENVIRONMENTAL METROLOGY CORP·Filed 2005·Granted Feb 19, 2008·40 cites·23 claims
- 0293US5302356AUltrapure water treatment systemARIZONA BOARD OF REAGENTS ACTI·Filed 1992·Granted Apr 12, 1994·133 cites·8 claims
- 0383US8253422B2Method of manufacture of wafers using an electro-chemical residue sensor (ECRS)VERMEIRE BERT M·Filed 2011·Granted Aug 28, 2012·6 cites·8 claims
- 0481US7489141B1Surface micro sensor and methodENVIRONMENTAL METROLOGY CORP·Filed 2005·Granted Feb 10, 2009·11 cites·18 claims
- 0580US6991733B2Process for removing organics from ultrapure waterIND TECH RES INST·Filed 2004·Granted Jan 31, 2006·28 cites·13 claims
- 0680US4346557AIncineration-cleanable composite diesel exhaust filter and vehicle equipped therewithGEN MOTORS CORP·Filed 1980·Granted Aug 31, 1982·45 cites·3 claims
- 0776US7932726B1Method of design optimization and monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS)ENVIRONMENTAL METROLOGY CORP·Filed 2008·Granted Apr 26, 2011·4 cites·18 claims
- 0873US5637544AReactive membrane for filtration and purification of gases of impurities and method utilizing the sameUNIV ARIZONA·Filed 1995·Granted Jun 10, 1997·36 cites·146 claims
- 0969US5196380AReactive membrane for filtration and purification of gases of impuritiesARIZONA BOARD OF REAGENTS·Filed 1991·Granted Mar 23, 1993·33 cites·10 claims
- 1066US7317317B1Shielded micro sensor and method for electrochemically monitoring residue in micro featuresENVIRONMENTAL METROLOGY CORP·Filed 2005·Granted Jan 8, 2008·5 cites·19 claims
- 1157US5635148AReactive membrane for filtration and purification of gases of impurities and method utilizing the sameUNIV ARIZONA·Filed 1995·Granted Jun 3, 1997·19 cites·58 claims
- 1249US8120368B2Method of monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS)VERMEIRE BERT M·Filed 2011·Granted Feb 21, 2012·0 cites·5 claims
- 1345US7202175B2Method and apparatus for treating a substrate surface by bubblingIND TECH RES INST·Filed 2003·Granted Apr 10, 2007·2 cites·3 claims
- 1435US4329844ADiesel exhaust filter-incineratorGEN MOTORS CORP·Filed 1980·Granted May 18, 1982·7 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →