Inventor · disambiguated record
Fazhi Song
Also filed as: SONG FAZHI
2 granted patents·3 pending applications·0 citations·filing 2022–2025
20Inventor score
Files withHARBIN INST TECHNOLOGY5
Top patents by PatentIndex Score
5 records- 0161US12124228B1Learning control system and method for nano-precision motion stageHARBIN INST TECHNOLOGY·Filed 2024·Granted Oct 22, 2024·0 cites·4 claims
- 0253US2024219869A1Dynamic decoupling control method for multi-degree-of-freedom precision motion stageHARBIN INST TECHNOLOGY·Filed 2023·Application pending·0 cites
- 0352US12386267B2Learning control system and method for ultra-precision lithographic apparatus based on uncertainty compensationHARBIN INST TECHNOLOGY·Filed 2025·Granted Aug 12, 2025·0 cites·2 claims
- 0451US2024202394A1Method for dynamic output force distribution of multi-degree-of-freedom over-actuated motion stageHARBIN INST TECHNOLOGY·Filed 2023·Application pending·0 cites
- 0550US2022276622A1Precise coordination control system and method for two motion stagesHARBIN INST TECHNOLOGY·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →