Inventor · disambiguated record
Feng-Yeu Shau
Also filed as: SHAU FENG-YEU
2 granted patents·111 citations·filing 1998–1999
67Inventor score
Files withPROMOS TECHNOLOGIES INC2
Top patents by PatentIndex Score
2 records- 0188US6153116AMethod of detecting end point and monitoring uniformity in chemical-mechanical polishing operationPROMOS TECHNOLOGIES INC·Filed 1998·Granted Nov 28, 2000·96 cites·16 claims
- 0244US6238279B1Magnetic filtration for slurry used in chemical mechanical polishing of semiconductor wafersPROMOS TECHNOLOGIES INC·Filed 1999·Granted May 29, 2001·15 cites·7 claims
Join the waitlist — get patent alerts
Get an alert when Feng-Yeu Shau files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →