Inventor · disambiguated record
Fernando M. Silva
Also filed as: SILVA FERNANDO M
2 granted patents·8 citations·filing 2017–2017
55Inventor score
Technology areasH10P
Files withAXCELIS TECH INC2
Top patents by PatentIndex Score
2 records- 0185US10087520B2Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-productsAXCELIS TECH INC·Filed 2017·Granted Oct 2, 2018·5 cites·20 claims
- 0279US10774419B2Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-productsAXCELIS TECH INC·Filed 2017·Granted Sep 15, 2020·3 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →