Inventor · disambiguated record
Florian Lampersberger
Also filed as: LAMPERSBERGER FLORIAN
4 granted patents·1 pending application·3 citations·filing 2019–2023
58Inventor score
Technology areasH01J
Top patents by PatentIndex Score
5 records- 0182US11094501B2Secondary charged particle imaging systemICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2019·Granted Aug 17, 2021·3 cites·25 claims
- 0256US11177114B1Electrode arrangement, contact assembly for an electrode arrangement, charged particle beam device, and method of reducing an electrical field strength in an electrode arrangementICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2020·Granted Nov 16, 2021·0 cites·20 claims
- 0354US2024355576A1Aberration corrector, a charged particle beam apparatus, a method of aligning an aberration corrector and a method of correcting aberration of a charged particle beamICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Application pending·0 cites
- 0451US11501947B1Aberration corrector and method of aligning aberration correctorICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2021·Granted Nov 15, 2022·0 cites·20 claims
- 0549US10991544B2Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimenICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2019·Granted Apr 27, 2021·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →