Inventor · disambiguated record
Florian Letzkus
Also filed as: LETZKUS FLORIAN
5 granted patents·115 citations·filing 2000–2008
81Inventor score
Top patents by PatentIndex Score
5 records- 0191US7687783B2Multi-beam deflector array device for maskless particle-beam processingIMS NANOFABRICATION AG·Filed 2008·Granted Mar 30, 2010·34 cites·27 claims
- 0288US6835508B2Large-area membrane mask and method for fabricating the maskINFINEON TECHNOLOGIES AG·Filed 2002·Granted Dec 28, 2004·43 cites·6 claims
- 0385US6696371B2Method for fabricating positionally exact surface-wide membrane masksINFINEON TECHNOLOGIES AG·Filed 2002·Granted Feb 24, 2004·32 cites·11 claims
- 0448US6864182B2Method of producing large-area membrane masks by dry etchingINFINEON TECHNOLOGIES AG·Filed 2002·Granted Mar 8, 2005·3 cites·14 claims
- 0547US6455429B1Method of producing large-area membrane masksSTUTTGART MIKROELEKTRONIK·Filed 2000·Granted Sep 24, 2002·3 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →