Inventor · disambiguated record
Frank C. Doughty
Also filed as: DOUGHTY FRANK C · DOUGHTY FRANK CHRISTIAN
5 granted patents·193 citations·filing 1998–2005
84Inventor score
Top patents by PatentIndex Score
5 records- 0189US6163006APermanent magnet ECR plasma source with magnetic field optimizationASTEX PLASMAQUEST INC·Filed 1998·Granted Dec 19, 2000·75 cites·7 claims
- 0284US7123361B1Microplasma emission spectrometerVERIONIX INC·Filed 2004·Granted Oct 17, 2006·39 cites·39 claims
- 0383US6396024B1Permanent magnet ECR plasma source with integrated multipolar magnetic confinementNEXX SYSTEMS PACKAGING LLC·Filed 1999·Granted May 28, 2002·44 cites·15 claims
- 0475US7309842B1Shielded monolithic microplasma source for prevention of continuous thin film formationVERIONIX INC·Filed 2005·Granted Dec 18, 2007·12 cites·27 claims
- 0567US6225592B1Method and apparatus for launching microwave energy into a plasma processing chamberASTEX PLASMAQUEST INC·Filed 1998·Granted May 1, 2001·23 cites·39 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →