Inventor · disambiguated record
Frank-Michael Kamm
Also filed as: KAMM FRANK-MICHAEL
17 granted patents·6 pending applications·190 citations·filing 2002–2019
93Inventor score
Files withINFINEON TECHNOLOGIES AG11GIESECKE & DEVRIENT MOBILE SECURITY GMBH5KAMM FRANK-MICHAEL2MUELDERS THOMAS2NOLSCHER CHRISTOPH1
Top patents by PatentIndex Score
23 records- 0195US7073969B2Method for fabricating a photomask for an integrated circuit and corresponding photomaskINFINEON TECHNOLOGIES AG·Filed 2003·Granted Jul 11, 2006·78 cites·8 claims
- 0288US6835508B2Large-area membrane mask and method for fabricating the maskINFINEON TECHNOLOGIES AG·Filed 2002·Granted Dec 28, 2004·43 cites·6 claims
- 0384US7376512B2Method for determining an optimal absorber stack geometry of a lithographic reflection maskINFINEON TECHNOLOGIES AG·Filed 2006·Granted May 20, 2008·13 cites·18 claims
- 0483US7408646B2Method and apparatus for determining local variation of the reflection or transmission behavior over a mask surfaceINFINEON TECHNOLOGIES AG·Filed 2005·Granted Aug 5, 2008·8 cites·7 claims
- 0578US10764260B2Distributed processing of a product on the basis of centrally encrypted stored dataGIESECKE & DEVRIENT MOBILE SECURITY GMBH·Filed 2016·Granted Sep 1, 2020·2 cites·17 claims
- 0676US7489386B2System and method for projecting a pattern from a mask onto a substrateQIMONDA AG·Filed 2007·Granted Feb 10, 2009·4 cites·26 claims
- 0776US6841786B2Method and configuration for compensating for unevenness in the surface of a substrateINFINEON TECHNOLOGIES AG·Filed 2003·Granted Jan 11, 2005·15 cites·14 claims
- 0875US11184343B2Method for carrying out an authenticationGIESECKE & DEVRIENT MOBILE SECURITY GMBH·Filed 2018·Granted Nov 23, 2021·3 cites·17 claims
- 0973US11258777B2Method for carrying out a two-factor authenticationGIESECKE & DEVRIENT MOBILE SECURITY GMBH·Filed 2018·Granted Feb 22, 2022·2 cites·14 claims
- 1068US11343074B2Block-chain based identity systemGIESECKE & DEVRIENT MOBILE SECURITY GMBH·Filed 2019·Granted May 24, 2022·1 cites·14 claims
- 1160US7588867B2Reflection mask, use of the reflection mask and method for fabricating the reflection maskINFINEON TECHNOLOGIES AG·Filed 2005·Granted Sep 15, 2009·1 cites·21 claims
- 1260US7094507B2Method for determining an optimal absorber stack geometry of a lithographic reflection maskINFINEON TECHNOLOGIES AG·Filed 2004·Granted Aug 22, 2006·9 cites·7 claims
- 1355US6773854B2Method of producing a perforated mask for particle radiationINFINEON TECHNOLOGIES AG·Filed 2002·Granted Aug 10, 2004·5 cites·11 claims
- 1454US7078135B2Method for patterning a mask layer and semiconductor productINFINEON TECHNOLOGIES AG·Filed 2003·Granted Jul 18, 2006·4 cites·14 claims
- 1550US7166393B2Reflection mask for projecting a structure onto a semiconductor wafer and method for producing the maskINFINEON TECHNOLOGIES AG·Filed 2003·Granted Jan 23, 2007·2 cites·11 claims
- 1646US2009219496A1Methods of Double Patterning, Photo Sensitive Layer Stack for Double Patterning and System for Double PatterningKAMM FRANK-MICHAEL·Filed 2008·Application pending·0 cites
- 1745US11341232B2Smart card as a security tokenGIESECKE & DEVRIENT MOBILE SECURITY GMBH·Filed 2019·Granted May 24, 2022·0 cites·13 claims
- 1843US2007075276A1Exposure system and method for operating an exposure systemNOLSCHER CHRISTOPH·Filed 2006·Application pending·0 cites
- 1939US7060399B2Reflective mirror for lithographic exposure and production methodINFINEON TECHNOLOGIES AG·Filed 2003·Granted Jun 13, 2006·0 cites·8 claims
- 2037US2006292459A1EUV reflection mask and method for producing itKAMM FRANK-MICHAEL·Filed 2006·Application pending·0 cites
- 2136US2008008972A1Method for Automatically Generating at Least One of a Mask Layout and an Illumination Pixel Pattern of an Imaging SystemMUELDERS THOMAS·Filed 2007·Application pending·0 cites
- 2234US2004067424A1Protective device for lithographic masks and method of using lithographic masksFiled 2003·Application pending·0 cites
- 2334US2008010627A1Method for automatically generating at least one of a mask layout and an illumination pixel pattern of an imaging systemMUELDERS THOMAS·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →