Inventor · disambiguated record
Frank Stietz
Also filed as: STIETZ FRANK
3 granted patents·1 pending application·37 citations·filing 2002–2006
70Inventor score
Files withZEISS CARL SMT AG4
Top patents by PatentIndex Score
4 records- 0178US7172788B2Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor deviceZEISS CARL SMT AG·Filed 2002·Granted Feb 6, 2007·19 cites·24 claims
- 0276US7060993B2Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elementsZEISS CARL SMT AG·Filed 2003·Granted Jun 13, 2006·15 cites·21 claims
- 0373US7462842B2Device, EUV lithographic device and method for preventing and cleaning contamination on optical elementsZEISS CARL SMT AG·Filed 2006·Granted Dec 9, 2008·3 cites·5 claims
- 0440US2004250572A1Method for producing radiation-resistant quartz glass material, and quartz glass materialZEISS CARL SMT AG·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →