Inventor · disambiguated record
Franz Sumnitsch
Also filed as: SUMNITSCH FRANZ
12 granted patents·1 pending application·1,078 citations·filing 1988–2001
94Inventor score
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13 records- 0195US4903717ASupport for slice-shaped articles and device for etching silicon wafers with such a supportSEZ SEMICONDUCTOR EQUIP ZUBEHO·Filed 1988·Granted Feb 27, 1990·331 cites·9 claims
- 0291US5513668ASupport for disk-shaped articlesSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1994·Granted May 7, 1996·147 cites·6 claims
- 0389US6383331B1Device for discharging two or more media with media nozzlesSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 2000·Granted May 7, 2002·38 cites·13 claims
- 0488US5762391AGripper for disk-shaped articlesSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1994·Granted Jun 9, 1998·124 cites·13 claims
- 0587US5492566ASupport for disk-shaped articles using the Bernoulli principleFiled 1994·Granted Feb 20, 1996·116 cites·13 claims
- 0683US5845662ADevice for treatment of wafer-shaped articles, especially silicon wafersFiled 1996·Granted Dec 8, 1998·75 cites·32 claims
- 0782US6162739AProcess for wet etching of semiconductor wafersSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1999·Granted Dec 19, 2000·76 cites·19 claims
- 0881US6316367B1Process and device for handling disk-like objects, especially silicon wafersSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 2000·Granted Nov 13, 2001·23 cites·3 claims
- 0976US6056825ARotary chuck including pins for lifting wafersSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1998·Granted May 2, 2000·42 cites·8 claims
- 1075US6193798B1Arrangement for treatment of wafer-shaped articles, particularly silicon wafersSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1998·Granted Feb 27, 2001·48 cites·3 claims
- 1169US6056208AApparatus for preventing dripping from conduit openingsSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1998·Granted May 2, 2000·30 cites·15 claims
- 1263US6022417ASupport for wafer-shaped objects, in particular silicon wafersFiled 1996·Granted Feb 8, 2000·28 cites·13 claims
- 1335US2001008804A1Device for dry etching a wafer and appertaining methodFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →