Inventor · disambiguated record
Frank Tsai
Also filed as: TSAI FRANK · TSAI FRANK CHING-FENG
5 granted patents·274 citations·filing 2001–2004
84Inventor score
Top patents by PatentIndex Score
5 records- 0198US6844550B1Multi-beam multi-column electron beam inspection systemMULTIBEAM SYSTEMS INC·Filed 2003·Granted Jan 18, 2005·142 cites·17 claims
- 0293US6977375B2Multi-beam multi-column electron beam inspection systemMULTIBEAM SYSTEMS INC·Filed 2001·Granted Dec 20, 2005·47 cites·29 claims
- 0390US6777675B2Detector optics for electron beam inspection systemMULTIBEAM·Filed 2002·Granted Aug 17, 2004·55 cites·19 claims
- 0486US7014966B2Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systemsADVANCED MICRO DEVICES INC·Filed 2003·Granted Mar 21, 2006·29 cites·22 claims
- 0546US7741012B1Method for removal of immersion lithography medium in immersion lithography processesADVANCED MICRO DEVICES INC·Filed 2004·Granted Jun 22, 2010·1 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →