Inventor · disambiguated record
Fung-Hsu Cheng
Also filed as: CHENG FUNG-HSU
1 granted patent·5 pending applications·6 citations·filing 2002–2003
28Inventor score
Files withSILICON INTEGRATED SYS CORP1
Top patents by PatentIndex Score
6 records- 0147US6727160B1Method of forming a shallow trench isolation structureSILICON INTEGRATED SYS CORP·Filed 2002·Granted Apr 27, 2004·6 cites·14 claims
- 0231US2004142562A1Method of fabricating a shallow trench isolation structureFiled 2003·Application pending·0 cites
- 0330US2004166691A1Method of etching a metal lineFiled 2003·Application pending·0 cites
- 0430US2004121604A1Method of etching a low-k dielectric layerFiled 2002·Application pending·0 cites
- 0526US2003129839A1Method of forming a liner in shallow trench isolationFiled 2002·Application pending·0 cites
- 0625US2004241948A1Method of fabricating stacked gate dielectric layerFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →