Inventor · disambiguated record
Fuminori Hayano
Also filed as: HAYANO FUMINORI
21 granted patents·2 pending applications·793 citations·filing 1987–2023
96Inventor score
Top patents by PatentIndex Score
23 records- 0197US4889998AApparatus with four light detectors for checking surface of mask with pellicleNIKON CORP·Filed 1988·Granted Dec 26, 1989·117 cites·9 claims
- 0296US4966457AInspecting apparatus for determining presence and location of foreign particles on reticles or pelliclesNIKON CORP·Filed 1989·Granted Oct 30, 1990·122 cites·13 claims
- 0391US5072128ADefect inspecting apparatus using multiple color light to detect defectsNIKON CORP·Filed 1990·Granted Dec 10, 1991·101 cites·14 claims
- 0491US4999510AApparatus for detecting foreign particles on a surface of a reticle or pellicleNIKON CORP·Filed 1989·Granted Mar 12, 1991·70 cites·7 claims
- 0588US5663569ADefect inspection method and apparatus, and defect display methodNIKON CORP·Filed 1994·Granted Sep 2, 1997·84 cites·16 claims
- 0686US10557706B2Measurement processing device, x-ray inspection apparatus, method for manufacturing structure, measurement processing method, x-ray inspection method, measurement processing program, and x-ray inspection programNIKON CORP·Filed 2017·Granted Feb 11, 2020·3 cites·34 claims
- 0784US10760902B2Measurement processing device, x-ray inspection apparatus, method for manufacturing structure, measurement processing method, x-ray inspection method, measurement processing program, and x-ray inspection programNIKON CORP·Filed 2018·Granted Sep 1, 2020·2 cites·12 claims
- 0884US5436464AForeign particle inspecting method and apparatus with correction for pellicle transmittanceNIKON CORP·Filed 1993·Granted Jul 25, 1995·73 cites·14 claims
- 0978US8269969B2Surface inspection device and surface inspection methodHAYANO FUMINORI·Filed 2011·Granted Sep 18, 2012·5 cites·21 claims
- 1078US4803373AConveyor arm apparatus with gap detectionNIKON CORP·Filed 1987·Granted Feb 7, 1989·53 cites·32 claims
- 1177US5473426ADefect inspection apparatusNIKON CORP·Filed 1995·Granted Dec 5, 1995·50 cites·17 claims
- 1276US5363187ALight scanning apparatus for detecting foreign particles on surface having circuit patternNIKON CORP·Filed 1993·Granted Nov 8, 1994·45 cites·26 claims
- 1373US2024036221A1Setting method, inspection method, defect evaluation device and structure manufacturing methodNIKON CORP·Filed 2023·Application pending·0 cites
- 1471US8115916B2Surface inspecting method and surface inspecting apparatusHAYANO FUMINORI·Filed 2010·Granted Feb 14, 2012·3 cites·20 claims
- 1570US11016038B2Measurement processing device, measurement processing method, measurement processing program, and method for manufacturing structureNIKON CORP·Filed 2014·Granted May 25, 2021·1 cites·35 claims
- 1665US11016039B2Measurement processing device, measurement processing method, measurement processing program, and method for manufacturing structureNIKON CORP·Filed 2018·Granted May 25, 2021·0 cites·16 claims
- 1764US7218399B2Method and apparatus for measuring optical overlay deviationNIKON CORP·Filed 2004·Granted May 15, 2007·6 cites·32 claims
- 1861US10809209B2Measurement processing device, x-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing methodNIKON CORP·Filed 2019·Granted Oct 20, 2020·0 cites·10 claims
- 1960US2019310385A1Setting method, inspection method, defect evaluation device and structure manufacturing methodNIKON CORP·Filed 2019·Application pending·0 cites
- 2059US5719405AParticle inspecting apparatus and method using fourier transformNIKON CORP·Filed 1996·Granted Feb 17, 1998·23 cites·9 claims
- 2158US5623340AForeign particle inspection apparatusNIKON CORP·Filed 1995·Granted Apr 22, 1997·22 cites·22 claims
- 2255US10481106B2Measurement processing device, X-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing methodNIKON CORP·Filed 2017·Granted Nov 19, 2019·0 cites·20 claims
- 2347US5149982AForeign particle inspection apparatusNIKON CORP·Filed 1992·Granted Sep 22, 1992·13 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →