Inventor · disambiguated record
Fuma Kizu
Also filed as: KIZU FUMA
2 granted patents·1 pending application·0 citations·filing 2022–2024
22Inventor score
Technology areasG03F
Files withCANON KK3
Top patents by PatentIndex Score
3 records- 0157US11947267B2Method of obtaining array of plurality of shot regions on substrate, exposure method, exposure apparatus, method of manufacturing article, non-transitory computer-readable storage medium, and information processing apparatusCANON KK·Filed 2022·Granted Apr 2, 2024·0 cites·13 claims
- 0256US2025036032A1Lithography method, article manufacturing method, information processing method, computer readable medium, and information processing apparatusCANON KK·Filed 2024·Application pending·0 cites
- 0354US12293505B2Evaluation apparatus, computer-readable storage medium, evaluation method, forming system, and article manufacturing methodCANON KK·Filed 2022·Granted May 6, 2025·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →