Inventor · disambiguated record
Fumio Komatsu
Also filed as: KOMATSU FUMIO
26 granted patents·784 citations·filing 1985–2000
97Inventor score
Top patents by PatentIndex Score
26 records- 0193US5359197AApparatus and method of aligning electron beam of scanning electron microscopeTOSHIBA KK·Filed 1993·Granted Oct 25, 1994·79 cites·32 claims
- 0291US4807159AApparatus and method for controlling irradiation of an electron beam at a fixed position in an electron beam tester systemTOSHIBA KK·Filed 1986·Granted Feb 21, 1989·72 cites·9 claims
- 0388US6515296B1Pattern dimension measuring system and pattern dimension measuring methodTOSHIBA KK·Filed 2000·Granted Feb 4, 2003·34 cites·14 claims
- 0486US5887080AMethod and apparatus for processing pattern image data by SEMTOSHIBA KK·Filed 1995·Granted Mar 23, 1999·102 cites·2 claims
- 0584US5811803AElectron microscopeTOSHIBA KK·Filed 1997·Granted Sep 22, 1998·47 cites·8 claims
- 0681US4894540AImage forming method using secondary electrons from object for noise eliminationTOSHIBA KK·Filed 1988·Granted Jan 16, 1990·26 cites·12 claims
- 0779US4910398APattern Measurement methodTOSHIBA KK·Filed 1988·Granted Mar 20, 1990·33 cites·13 claims
- 0875US5161201AMethod of and apparatus for measuring pattern profileTOSHIBA KK·Filed 1991·Granted Nov 3, 1992·37 cites·3 claims
- 0974US6187488B1Pattern estimating method and pattern forming methodTOSHIBA KK·Filed 2000·Granted Feb 13, 2001·13 cites·20 claims
- 1074US5479535AMethod of extracting features of imageTOSHIBA KK·Filed 1994·Granted Dec 26, 1995·46 cites·12 claims
- 1173US6114681AAutomatic focus control method and automatic focus control system having in focus and out of focus states detectionTOSHIBA KK·Filed 1998·Granted Sep 5, 2000·25 cites·12 claims
- 1272US5029250APattern configuration measuring apparatusTOSHIBA KK·Filed 1989·Granted Jul 2, 1991·27 cites·6 claims
- 1366US5497407AContaminating-element analyzing methodTOSHIBA KK·Filed 1993·Granted Mar 5, 1996·28 cites·5 claims
- 1465US5315119AElectron beam irradiating apparatus and electric signal detecting apparatusTOSHIBA KK·Filed 1992·Granted May 24, 1994·14 cites·6 claims
- 1561US6363167B1Method for measuring size of fine patternTOSHIBA KK·Filed 1999·Granted Mar 26, 2002·32 cites·20 claims
- 1660US6111981AMethod and apparatus for processing pattern image data by SEMTOSHIBA KK·Filed 1998·Granted Aug 29, 2000·29 cites·4 claims
- 1760US5430786AElement analyzing methodTOSHIBA KK·Filed 1993·Granted Jul 4, 1995·22 cites·7 claims
- 1859US5159643AMethod and apparatus for measuring pattern dimensionTOSHIBA KK·Filed 1991·Granted Oct 27, 1992·21 cites·5 claims
- 1958US5247588AMethod of image restorationTOSHIBA KK·Filed 1991·Granted Sep 21, 1993·24 cites·9 claims
- 2057US5302829AAutomatic focusing method for scanning electron microscopyTOSHIBA KK·Filed 1993·Granted Apr 12, 1994·14 cites·3 claims
- 2146US5555319ACritical dimension measuring method and equipment thereofTOSHIBA KK·Filed 1994·Granted Sep 10, 1996·22 cites·3 claims
- 2246US5422925AContaminating-element analyzing method and apparatus of the sameTOSHIBA KK·Filed 1993·Granted Jun 6, 1995·12 cites·9 claims
- 2341US4644170AMethod of electron beam exposureTOKYO SHIBAURA ELECTRIC CO·Filed 1985·Granted Feb 17, 1987·10 cites·9 claims
- 2438US5818217AElectron beam irradiating apparatus and electric signal detecting apparatusTOSHIBA KK·Filed 1994·Granted Oct 6, 1998·3 cites·6 claims
- 2538US5490194AMethod and apparatus for analyzing contaminative element concentrationsTOSHIBA KK·Filed 1994·Granted Feb 6, 1996·7 cites·4 claims
- 2635US5528648AMethod and apparatus for analyzing contaminative element concentrationsTOSHIBA KK·Filed 1994·Granted Jun 18, 1996·5 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →