Inventor · disambiguated record
Fu-Su Lee
Also filed as: LEE FU-SU
3 granted patents·1 pending application·21 citations·filing 2002–2004
67Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG4
Top patents by PatentIndex Score
4 records- 0165US6740196B2RTA chamber with in situ reflective index monitorTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 25, 2004·12 cites·6 claims
- 0253US7089677B2Method for calibrating alignment mark positions on substratesTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Aug 15, 2006·7 cites·19 claims
- 0347US6777251B2Metrology for monitoring a rapid thermal annealing processTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 17, 2004·2 cites·17 claims
- 0435US2003230323A1Apparatus and method for improving scrubber cleaningTAIWAN SEMICONDUCTOR MFG·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →