Inventor · disambiguated record
Fumiaki Shigemitsu
Also filed as: SHIGEMITSU FUMIAKI
6 granted patents·122 citations·filing 1985–2002
85Inventor score
Top patents by PatentIndex Score
6 records- 0186US6991878B2Photomask repair method and apparatusTOSHIBA KK·Filed 2002·Granted Jan 31, 2006·23 cites·18 claims
- 0278US4840874AMethod of forming resist patternTOSHIBA KK·Filed 1987·Granted Jun 20, 1989·30 cites·11 claims
- 0363US4717645AMethod and apparatus for forming resist patternTOKYO SHIBAURA ELECTRIC CO·Filed 1985·Granted Jan 5, 1988·26 cites·15 claims
- 0458US4976810AMethod of forming pattern and apparatus for implementing the sameTOSHIBA KK·Filed 1990·Granted Dec 11, 1990·20 cites·19 claims
- 0551US5051338AMethod and apparatus for forming resist patternTOKYO SHIBAURA ELECTRIC CO·Filed 1989·Granted Sep 24, 1991·16 cites·6 claims
- 0644US4897337AMethod and apparatus for forming resist patternTOKYO SHIBAURA ELECTRIC CO·Filed 1987·Granted Jan 30, 1990·7 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →