Inventor · disambiguated record
Fuquan Song
Also filed as: SONG FUQUAN
4 granted patents·1 pending application·45 citations·filing 2006–2021
75Inventor score
Top patents by PatentIndex Score
5 records- 0190US8039062B2Methods of atomic layer deposition using hafnium and zirconium-based precursorsSIGMA ALDRICH CO LLC·Filed 2008·Granted Oct 18, 2011·21 cites·25 claims
- 0289US8568530B2Use of cyclopentadienyl type hafnium and zirconium precursors in atomic layer depositionHEYS PETER NICHOLAS·Filed 2006·Granted Oct 29, 2013·16 cites·19 claims
- 0384US8221852B2Methods of atomic layer deposition using titanium-based precursorsHEYS PETER NICHOLAS·Filed 2008·Granted Jul 17, 2012·8 cites·16 claims
- 0464USRE45124EMethods of atomic layer deposition using titanium-based precursorsHEYS PETER NICHOLAS·Filed 2013·Granted Sep 9, 2014·0 cites·32 claims
- 0545US2022048932A1Process for continuous purification of high-purity trimethylaluminumANHUI BOTAI ELECTRONIC MAT CO LTD·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →