Inventor · disambiguated record
Fumio Uehara
Also filed as: UEHARA FUMIO
2 granted patents·75 citations·filing 1998–2000
67Inventor score
Technology areasH10P
Files withCANON KK2
Top patents by PatentIndex Score
2 records- 0183US6767840B1Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication methodCANON KK·Filed 2000·Granted Jul 27, 2004·36 cites·12 claims
- 0269US6199563B1Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication methodCANON KK·Filed 1998·Granted Mar 13, 2001·39 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →