Inventor · disambiguated record
Gerhard Kunkel
Also filed as: KUNKEL GERHARD
25 granted patents·10 pending applications·245 citations·filing 1998–2019
96Inventor score
Top patents by PatentIndex Score
35 records- 0186US8362537B2Memory devices including semiconductor pillarsQIMONDA AG·Filed 2012·Granted Jan 29, 2013·7 cites·12 claims
- 0284US6451508B1Plural interleaved exposure process for increased feature aspect ratio in dense arraysIBM·Filed 2000·Granted Sep 17, 2002·24 cites·13 claims
- 0380US6511791B1Multiple exposure process for formation of dense rectangular arraysIBM·Filed 2000·Granted Jan 28, 2003·19 cites·15 claims
- 0479US6383691B1Photomask and method for increasing image aspect ratio while relaxing mask fabrication requirementsINFINEON TECHNOLOGIES AG·Filed 2000·Granted May 7, 2002·17 cites·23 claims
- 0576US6727989B1Enhanced overlay measurement marks for overlay alignment and exposure tool condition controlINFINEON TECHNOLOGIES AG·Filed 2000·Granted Apr 27, 2004·16 cites·5 claims
- 0675US6379869B1Method of improving the etch resistance of chemically amplified photoresists by introducing silicon after patterningINFINEON TECHNOLOGIES AG·Filed 1999·Granted Apr 30, 2002·36 cites·25 claims
- 0763US6420272B1Method for removal of hard mask used to define noble metal electrodeINFINEON TECHNOLOGIES AG·Filed 1999·Granted Jul 16, 2002·29 cites·8 claims
- 0861US6211544B1Memory cell layout for reduced interaction between storage nodes and transistorsINFINEON TECHNOLOGIES CORP·Filed 1999·Granted Apr 3, 2001·19 cites·23 claims
- 0959US6606151B2Grating patterns and method for determination of azimuthal and radial aberrationINFINEON TECHNOLOGIES AG·Filed 2001·Granted Aug 12, 2003·8 cites·35 claims
- 1058US6282116B1Dynamic random access memoryINFINEON TECHNOLOGIES CORP·Filed 2000·Granted Aug 28, 2001·10 cites·16 claims
- 1153US7465522B2Photolithographic mask having half tone main features and perpendicular half tone assist featuresINFINEON TECHNOLOGIES AG·Filed 2002·Granted Dec 16, 2008·4 cites·18 claims
- 1253US6911687B1Buried bit line-field isolation defined active semiconductor areasIBM·Filed 2000·Granted Jun 28, 2005·10 cites·13 claims
- 1351US6566219B2Method of forming a self aligned trench in a semiconductor using a patterned sacrificial layer for defining the trench openingINFINEON TECHNOLOGIES AG·Filed 2001·Granted May 20, 2003·4 cites·25 claims
- 1450US2010090263A1Memory devices including semiconductor pillarsQIMONDA AG·Filed 2008·Application pending·0 cites
- 1549US6842222B2Method of reducing pitch on semiconductor waferINFINEON TECHNOLOGIES AG·Filed 2003·Granted Jan 11, 2005·3 cites·12 claims
- 1648US6365328B1Semiconductor structure and manufacturing methodINFINEON TECHNOLOGIES CORP·Filed 2000·Granted Apr 2, 2002·3 cites·7 claims
- 1747US7074529B2Phase-shift maskINFINEON TECHNOLOGIES AG·Filed 2004·Granted Jul 11, 2006·1 cites·8 claims
- 1846US2009321940A1Method for Manufacturing Contact Openings, Method for Manufacturing an Integrated Circuit, an Integrated CircuitKUNKEL GERHARD·Filed 2008·Application pending·0 cites
- 1945US6590657B1Semiconductor structures and manufacturing methodsINFINEON TECHNOLOGIES CORP·Filed 1999·Granted Jul 8, 2003·12 cites·4 claims
- 2043US6558883B2Apparatus and method for patterning a semiconductor waferINFINEON TECHNOLOGIES AG·Filed 2001·Granted May 6, 2003·1 cites·23 claims
- 2143US6136660AStacked capacitator memory cell and method of fabricationSIEMENS AG·Filed 1998·Granted Oct 24, 2000·8 cites·7 claims
- 2241US7482110B2Method for adapting structure dimensions during the photolithographic projection of a pattern of structure elements onto a semiconductor waferINFINEON TECHNOLOGIES AG·Filed 2005·Granted Jan 27, 2009·0 cites·30 claims
- 2341US7462426B2Method for producing a phase maskINFINEON TECHNOLOGIES AG·Filed 2005·Granted Dec 9, 2008·0 cites·15 claims
- 2441US2006121365A1Mask and exposure deviceINFINEON TECHNOLOGIES AG·Filed 2005·Application pending·0 cites
- 2540US7248351B2Optimizing light path uniformity in inspection systemsINFINEON TECHNOLOGIES AG·Filed 2005·Granted Jul 24, 2007·0 cites·17 claims
- 2639US6118683ADynamic random access memory cell layoutINFINEON TECHNOLOGIES CORP·Filed 1999·Granted Sep 12, 2000·6 cites·7 claims
- 2739US6083788AStacked capacitor memory cell and method of manufactureINFINEON TECHNOLOGIES CORP·Filed 1999·Granted Jul 4, 2000·8 cites·13 claims
- 2837US6809800B2Apparatus for patterning a semiconductor waferINFINEON TECHNOLOGIES AG·Filed 2003·Granted Oct 26, 2004·0 cites·24 claims
- 2937US2021391481A1Power Semiconductor Device and Shadow-Mask Free Method for Producing Such DeviceABB POWER GRIDS SWITZERLAND AG·Filed 2019·Application pending·0 cites
- 3036US2004027553A1Method for the characterization of an illumination source in an exposure apparatusFiled 2003·Application pending·0 cites
- 3134US2005026049A1Method for forming an opening on an alternating phase shift maskFiled 2004·Application pending·0 cites
- 3231US2006194130A1Run to run control for lens aberrationsROBERTS WILLIAM·Filed 2005·Application pending·0 cites
- 3331US2005106476A1Method for producing a mask adapted to an exposure apparatusFiled 2004·Application pending·0 cites
- 3431US2006193531A1System for analyzing images of blazed phase grating samplesROBERTS WILLIAM·Filed 2005·Application pending·0 cites
- 3531US2006192943A1Optimizing focal plane fitting functions for an image field on a substrateROBERTS WILLIAM·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →