Inventor · disambiguated record
Gil Su Son
Also filed as: SON GIL-SU
0 granted patents·3 pending applications·0 citations·filing 2008–2017
Top patents by PatentIndex Score
3 records- 0144US2008317965A1Plasma processing apparatus and methodSAMSUNG ELECTRONICS CO LTD·Filed 2008·Application pending·0 cites
- 0237US2017338137A1Methods of evaluating a process and methods of controlling a substrate processing system using the sameSON GIL-SU·Filed 2017·Application pending·0 cites
- 0325US2012098545A1Plasma Diagnostic Apparatus And Method For Controlling The SameSON GIL SU·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →