Inventor · disambiguated record
Gil-Woo Song
Also filed as: SONG GIL-WOO
6 granted patents·3 pending applications·25 citations·filing 2014–2020
79Inventor score
Top patents by PatentIndex Score
9 records- 0190US9841688B2Method for detecting overlay error and method for manufacturing semiconductor device using the sameKO KANG-WOONG·Filed 2015·Granted Dec 12, 2017·11 cites·20 claims
- 0287US10001444B2Surface inspecting methodSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jun 19, 2018·4 cites·19 claims
- 0383US9267879B2Ellipsometer for detecting surfaceSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Feb 23, 2016·5 cites·12 claims
- 0481US11043433B2Method of inspecting surface and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Jun 22, 2021·1 cites·26 claims
- 0581US10249544B2Method of inspecting surface and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Apr 2, 2019·2 cites·20 claims
- 0670US10551326B2Method for measuring semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Feb 4, 2020·2 cites·16 claims
- 0757US2019214316A1Method of inspecting surface and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Application pending·0 cites
- 0834US2017200658A1Methods of inspecting substrates and semiconductor fabrication methods incorporating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Application pending·0 cites
- 0934US2018144995A1Optical inspection apparatus and method and method of fabricating semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →