Inventor · disambiguated record
Gordon Hill
Also filed as: HILL GORDON · HILL GORDON S
21 granted patents·7 pending applications·59 citations·filing 1987–2024
93Inventor score
Top patents by PatentIndex Score
28 records- 0193US10649471B2Method and apparatus for pulse gas delivery with isolation valvesMKS INSTR INC·Filed 2018·Granted May 12, 2020·7 cites·22 claims
- 0290US11024489B2Method and apparatus for deposition cleaning in a pumping lineMKS INSTR INC·Filed 2019·Granted Jun 1, 2021·4 cites·11 claims
- 0388US10535506B2Method and apparatus for deposition cleaning in a pumping lineMKS INSTR INC·Filed 2017·Granted Jan 14, 2020·4 cites·21 claims
- 0487US10337105B2Method and apparatus for valve deposition cleaning and prevention by plasma dischargeMKS INSTR INC·Filed 2016·Granted Jul 2, 2019·5 cites·22 claims
- 0583US9133960B2Fluid control valvesMKS INSTR INC·Filed 2013·Granted Sep 15, 2015·7 cites·19 claims
- 0682US11367598B2Method and apparatus for deposition cleaning in a pumping lineMKS INSTR INC·Filed 2020·Granted Jun 21, 2022·1 cites·21 claims
- 0781US11664197B2Method and apparatus for plasma generationMKS INSTR INC·Filed 2021·Granted May 30, 2023·1 cites·26 claims
- 0880US11054058B2Actively cooled vacuum isolation valveMKS INSTR INC·Filed 2019·Granted Jul 6, 2021·3 cites·35 claims
- 0974US8037896B2Pressure regulation in remote zonesMKS INSTR INC·Filed 2006·Granted Oct 18, 2011·4 cites·9 claims
- 1073US7950294B2Preventive maintenance diagnostics for valve systemsMKS INSTR INC·Filed 2008·Granted May 31, 2011·7 cites·14 claims
- 1168US10557736B2Predictive diagnostics systems and methods using vacuum pressure control valvesMKS INSTR INC·Filed 2017·Granted Feb 11, 2020·1 cites·16 claims
- 1266US11480457B2Predictive diagnostics systems and methods using vacuum pressure control valvesMKS INSTR INC·Filed 2019·Granted Oct 25, 2022·0 cites·22 claims
- 1364US8689822B2Pressure regulation in remote zonesSHAJII ALI·Filed 2011·Granted Apr 8, 2014·1 cites·6 claims
- 1464US2024063001A1Methods and systems for endpoint detection in foreline of chamber clean and foreline clean processesMKS INSTR INC·Filed 2023·Application pending·0 cites
- 1563US2025087457A1Inverted plasma source, and methodMKS INSTR INC·Filed 2024·Application pending·0 cites
- 1662US12207385B2Method and apparatus for plasma ignition in toroidal plasma sourcesMKS INSTR INC·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 1762US12159765B2Method and apparatus for plasma generationMKS INSTR INC·Filed 2022·Granted Dec 3, 2024·0 cites·26 claims
- 1858US7369920B2Pressure control system with optimized performanceMKS INSTR INC·Filed 2006·Granted May 6, 2008·5 cites·13 claims
- 1958US2024407075A1Inverted plasma sourceMKS INSTR INC·Filed 2024·Application pending·0 cites
- 2056US2024312772A1Apparatus and method for current sensing using embedded electrodesMKS INSTR INC·Filed 2023·Application pending·0 cites
- 2154US7643909B2Highly responsive master-slave valve positioningMKS INSTR INC·Filed 2006·Granted Jan 5, 2010·3 cites·29 claims
- 2252US11745229B2Endpoint detection of deposition cleaning in a pumping line and a processing chamberMKS INSTR INC·Filed 2020·Granted Sep 5, 2023·0 cites·8 claims
- 2350US9945486B2Radial sealing butterfly valveMKS INSTR INC·Filed 2016·Granted Apr 17, 2018·0 cites·26 claims
- 2449US11854839B2Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolationMKS INSTR INC·Filed 2020·Granted Dec 26, 2023·0 cites·14 claims
- 2544US2017292633A1Actively cooled vacuum isolation valveMKS INSTR INC·Filed 2017·Application pending·0 cites
- 2640US2008216901A1Pressure control for vacuum processing systemMKS INSTR INC·Filed 2007·Application pending·0 cites
- 2740US2009137192A1Multi-zone pressure control systemMKS INSTR INC·Filed 2007·Application pending·0 cites
- 2838US4799063AMethod and apparatus for isolating faults in an antenna systemGRUMMAN AEROSPACE CORP·Filed 1987·Granted Jan 17, 1989·6 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →