Inventor · disambiguated record
Go Ichinose
Also filed as: ICHINOSE GO
16 granted patents·13 pending applications·42 citations·filing 2005–2024
90Inventor score
Top patents by PatentIndex Score
29 records- 0192US11274919B2Measurement system, substrate processing system, and device manufacturing methodNIKON CORP·Filed 2019·Granted Mar 15, 2022·4 cites·37 claims
- 0291US8472008B2Movable body apparatus, exposure apparatus and device manufacturing methodICHINOSE GO·Filed 2010·Granted Jun 25, 2013·10 cites·17 claims
- 0390US10777441B2Measurement system, substrate processing system, and device manufacturing methodNIKON CORP·Filed 2019·Granted Sep 15, 2020·7 cites·33 claims
- 0490US9865494B2Substrate holding method, substrate holding apparatus, exposure apparatus and exposure methodNIPPON KOGAKU KK·Filed 2013·Granted Jan 9, 2018·9 cites·40 claims
- 0583US8294878B2Exposure apparatus and device manufacturing methodICHINOSE GO·Filed 2010·Granted Oct 23, 2012·5 cites·27 claims
- 0681US10242903B2Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Mar 26, 2019·5 cites·9 claims
- 0776US11915961B2Measurement system, substrate processing system, and device manufacturing methodNIKON CORP·Filed 2022·Granted Feb 27, 2024·0 cites·22 claims
- 0872US10586728B2Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2019·Granted Mar 10, 2020·1 cites·28 claims
- 0971US2022155062A1Measurement system, substrate processing system, and device manufacturing methodNIKON CORP·Filed 2022·Application pending·0 cites
- 1070US11430684B2Measurement system, substrate processing system, and device manufacturing methodNIKON CORP·Filed 2021·Granted Aug 30, 2022·0 cites·28 claims
- 1167US11107718B2Measurement system, substrate processing system, and device manufacturing methodNIKON CORP·Filed 2020·Granted Aug 31, 2021·0 cites·39 claims
- 1267USRE48429ESubstrate holding method, substrate holding apparatus, exposure apparatus and exposure methodNIKON CORP·Filed 2013·Granted Feb 9, 2021·1 cites·41 claims
- 1363US11289362B2Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2020·Granted Mar 29, 2022·0 cites·15 claims
- 1462US2025014918A1Correction apparatus, exposure apparatus, coater and developer apparatus, exposure system, exposure method, and device manufacturing methodNIKON CORP·Filed 2024·Application pending·0 cites
- 1561US2024367257A1Methods for large-scale optical manufacturingNIKON CORP·Filed 2022·Application pending·0 cites
- 1654US2018174884A1Substrate holding method, substrate holding apparatus, exposure apparatus and exposure methodNIKON CORP·Filed 2017·Application pending·0 cites
- 1751US2024293964A1Mold and blade memberNIKON CORPORTION·Filed 2021·Application pending·0 cites
- 1846US2009109413A1Maintenance method, exposure method and apparatus, and device manufacturing methodNIKON CORP·Filed 2008·Application pending·0 cites
- 1944US2008013060A1Support Apparatus, Stage Apparatus, Exposure Apparatus, And Device Manufacturing MethodNIKON CORP·Filed 2005·Application pending·0 cites
- 2041US8841065B2Manufacturing method of exposure apparatus and device manufacturing methodICHINOSE GO·Filed 2011·Granted Sep 23, 2014·0 cites·68 claims
- 2140US8355116B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2010·Granted Jan 15, 2013·0 cites·24 claims
- 2239US8355114B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2010·Granted Jan 15, 2013·0 cites·19 claims
- 2337US8446569B2Exposure apparatus, exposure method and device manufacturing methodICHINOSE GO·Filed 2010·Granted May 21, 2013·0 cites·113 claims
- 2437US2011075120A1Exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2010·Application pending·0 cites
- 2537US2011086315A1Exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2010·Application pending·0 cites
- 2637US2011102762A1Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2010·Application pending·0 cites
- 2737US2013057837A1Exposure apparatus, exposure method, device-manufacturing method, program, and recording mediumICHINOSE GO·Filed 2012·Application pending·0 cites
- 2836US2011085150A1Exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2010·Application pending·0 cites
- 2936US2011008734A1Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →