Inventor · disambiguated record

H. L. Chen

Also filed as: CHEN H L

2 granted patents·38 citations·filing 1998–1999

64Inventor score

Technology areasG03F

Files withIND TECH RES INST2

Top patents by PatentIndex Score

2 records

0172US6045954AFormation of silicon nitride film for a phase shift mask at 193 nmIND TECH RES INST·Filed 1998·Granted Apr 4, 2000·29 cites·7 claims
0246US6319568B1Formation of silicon nitride film for a phase shift mask at 193 nmIND TECH RES INST·Filed 1999·Granted Nov 20, 2001·9 cites·9 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →