Inventor · disambiguated record

H.A. Van Mierlo

Also filed as: SIPOS GISELA

1 granted patent·2 citations·filing 2006–2006

20Inventor score

Technology areasG03F

Files withZEISS CARL SMT AG1

Top patents by PatentIndex Score

1 record

0167US7646004B2Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical elementZEISS CARL SMT AG·Filed 2006·Granted Jan 12, 2010·2 cites·50 claims

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