Inventor · disambiguated record
Hai-Yin Chen
Also filed as: CHEN HAI-YIN
3 granted patents·4 citations·filing 2016–2019
59Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD3
Top patents by PatentIndex Score
3 records- 0180US10283457B2Method for lithographically forming wafer identification marks and alignment marksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 7, 2019·2 cites·20 claims
- 0277US10283456B2Lithography engraving machine for forming water identification marks and aligment marksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted May 7, 2019·2 cites·20 claims
- 0364US11562968B2Apparatus for lithographically forming wafer identification marks and alignment marksTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 24, 2023·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →