Inventor · disambiguated record
Hajime Hayakawa
Also filed as: HAYAKAWA HAJIME
2 granted patents·77 citations·filing 1991–1993
67Inventor score
Files withHITACHI LTD2
Top patents by PatentIndex Score
2 records- 0182US5168166ACharged particle beam projection aligner having position detector using light beamHITACHI LTD·Filed 1991·Granted Dec 1, 1992·47 cites·18 claims
- 0268US5441849AMethod of forming pattern and making semiconductor device using radiation-induced conductive resin bottom resist layerHITACHI LTD·Filed 1993·Granted Aug 15, 1995·30 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →