Inventor · disambiguated record
Hak-Pil Kim
Also filed as: KIM HAK-PIL
2 granted patents·51 citations·filing 1998–2000
65Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD2
Top patents by PatentIndex Score
2 records- 0173US6146492APlasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaning methodSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Nov 14, 2000·41 cites·23 claims
- 0265US6499492B1Plasma process apparatus with in situ monitoring, monitoring method, and in situ residue cleaningSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Dec 31, 2002·10 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →