Inventor · disambiguated record
Hans P. Kleinknecht
Also filed as: BOSENBERG WOLFRAM A · KLEINKNECHT HANS P · KLEINKNECHT HANS PETER
16 granted patents·887 citations·filing 1975–1988
96Inventor score
Top patents by PatentIndex Score
16 records- 0197US4408884AOptical measurements of fine line parameters in integrated circuit processesRCA CORP·Filed 1981·Granted Oct 11, 1983·217 cites·21 claims
- 0296US4141780AOptically monitoring the thickness of a depositing layerRCA CORP·Filed 1977·Granted Feb 27, 1979·80 cites·8 claims
- 0395US4211488AOptical testing of a semiconductorRCA CORP·Filed 1978·Granted Jul 8, 1980·76 cites·10 claims
- 0494US4211489APhotomask alignment systemRCA CORP·Filed 1978·Granted Jul 8, 1980·67 cites·23 claims
- 0593US4330213AOptical line width measuring apparatus and methodRCA CORP·Filed 1980·Granted May 18, 1982·60 cites·15 claims
- 0692US4303341AOptically testing the lateral dimensions of a patternRCA CORP·Filed 1979·Granted Dec 1, 1981·51 cites·17 claims
- 0790US4964726AApparatus and method for optical dimension measurement using interference of scattered electromagnetic energyGEN ELECTRIC·Filed 1988·Granted Oct 23, 1990·56 cites·56 claims
- 0890US4200396AOptically testing the lateral dimensions of a patternRCA CORP·Filed 1977·Granted Apr 29, 1980·48 cites·10 claims
- 0989US4668080AMethod and apparatus for forming large area high resolution patternsRCA CORP·Filed 1985·Granted May 26, 1987·54 cites·25 claims
- 1089US4039370AOptically monitoring the undercutting of a layer being etchedRCA CORP·Filed 1976·Granted Aug 2, 1977·54 cites·16 claims
- 1178US4708436AOptical imager with diffractive lenticular arrayRCA CORP·Filed 1985·Granted Nov 24, 1987·36 cites·15 claims
- 1277US4188123AOptically measuring the carrier concentration in a semiconductorRCA CORP·Filed 1978·Granted Feb 12, 1980·27 cites·8 claims
- 1375US4422763AAutomatic photomask alignment system for projection printingRCA CORP·Filed 1982·Granted Dec 27, 1983·26 cites·12 claims
- 1466US4456879AMethod and apparatus for determining the doping profile in epitaxial layers of semiconductorsRCA CORP·Filed 1981·Granted Jun 26, 1984·22 cites·18 claims
- 1550US4005436AApparatus for making a recording of an electrostatic charge patternRCA CORP·Filed 1975·Granted Jan 25, 1977·9 cites·7 claims
- 1634US4579454AOptical profilometer for steep surface contours with significant surface tiltRCA CORP·Filed 1985·Granted Apr 1, 1986·4 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →