Inventor · disambiguated record
Hailiang Lu
Also filed as: LU HAILIANG
4 granted patents·1 pending application·6 citations·filing 2015–2018
61Inventor score
Top patents by PatentIndex Score
5 records- 0184US10268125B2Device and method for detecting overlay errorSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2016·Granted Apr 23, 2019·5 cites·16 claims
- 0276US10937151B2Automatic optical inspection methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Mar 2, 2021·1 cites·9 claims
- 0336US11549891B2Automatic optical inspection device and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Jan 10, 2023·0 cites·14 claims
- 0433US10942129B2Chip defect detection device and detection methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Mar 9, 2021·0 cites·10 claims
- 0523US2017144251A1Laser annealing deviceSHANGHAI MICROELECTRONICS EQUI·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →