Inventor · disambiguated record
Haihua Mu
Also filed as: MU HAIHUA
14 granted patents·3 pending applications·10 citations·filing 2012–2016
84Inventor score
Top patents by PatentIndex Score
17 records- 0173US9879979B2Heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2013·Granted Jan 30, 2018·4 cites·9 claims
- 0269US10532832B2Magnetic levitation reaction sphereUNIV TSINGHUA·Filed 2016·Granted Jan 14, 2020·2 cites·4 claims
- 0363US9903704B2Three-DOF heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Granted Feb 27, 2018·2 cites·6 claims
- 0457US9885556B2Dual-frequency grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2013·Granted Feb 6, 2018·1 cites·8 claims
- 0556US9752643B2Negative stiffness system for gravity compensation of micropositionerSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Sep 5, 2017·1 cites·3 claims
- 0648US9869857B2Optical grating phase modulator for laser interference photoetching systemUNIV TSINGHUA·Filed 2014·Granted Jan 16, 2018·0 cites·4 claims
- 0744US2015326150A1Maglev workpiece table with six degrees of freedomUNIV TSINGHUA·Filed 2013·Application pending·0 cites
- 0843US9791789B2Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Oct 17, 2017·0 cites·4 claims
- 0943US9310797B2Single degree of freedom vibration isolating device of linear motor and motion control method thereofUNIV TSINGHUA·Filed 2013·Granted Apr 12, 2016·0 cites·6 claims
- 1042US9182217B2Method for measuring displacement of large-range moving platformUNIV TSINGHUA·Filed 2013·Granted Nov 10, 2015·0 cites·5 claims
- 1142US8958078B2Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in spaceZHANG MING·Filed 2012·Granted Feb 17, 2015·0 cites·2 claims
- 1242US2016138903A1Two-dof heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Application pending·0 cites
- 1341US2015311099A1Wafer Stage Having Function of Anti-CollisionSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Application pending·0 cites
- 1440US9766054B2Planar motor rotor displacement measuring device and its measuring methodSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Sep 19, 2017·0 cites·3 claims
- 1540US9310782B2Method for measuring displacement of planar motor rotorSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Apr 12, 2016·0 cites·3 claims
- 1634US9904183B2Coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Feb 27, 2018·0 cites·5 claims
- 1733US9995569B2Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stageUNIV TSINGHUA·Filed 2016·Granted Jun 12, 2018·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →