Inventor · disambiguated record
Haruo Ozawa
Also filed as: OZAWA HARUO
4 granted patents·306 citations·filing 1984–1999
83Inventor score
Top patents by PatentIndex Score
4 records- 0196US4939630AIllumination optical apparatusNIKON CORP·Filed 1988·Granted Jul 3, 1990·115 cites·14 claims
- 0290US6341006B1Projection exposure apparatusNIKON CORP·Filed 1999·Granted Jan 22, 2002·99 cites·43 claims
- 0387US4737920AMethod and apparatus for correcting rotational errors during inspection of reticles and masksNIPPON KOGAKU KK·Filed 1984·Granted Apr 12, 1988·53 cites·9 claims
- 0471US5207505AIllumination light source deviceNIKON CORP·Filed 1991·Granted May 4, 1993·39 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →