Inventor · disambiguated record
Hachul Shin
Also filed as: SHIN HACHUL
0 granted patents·2 pending applications·0 citations·filing 2023–2023
Technology areasG03F
Files withSAMSUNG ELECTRONICS CO LTD2
Top patents by PatentIndex Score
2 records- 0164US2024219848A1Extreme ultraviolet exposure apparatus including a mask stageSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0259US2024176230A1Method of correcting euv overlay and method of manufacturing semiconductor device including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →