Inventor · disambiguated record
Hee Man Ahn
Also filed as: AHN HEE MAN
4 granted patents·8 pending applications·0 citations·filing 2021–2024
51Inventor score
Files withSEMES CO LTD12
Top patents by PatentIndex Score
12 records- 0155US2025210379A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0254US12140868B2Substrate treating apparatus with exhaust airflow guideSEMES CO LTD·Filed 2022·Granted Nov 12, 2024·0 cites·20 claims
- 0352US12228861B2Apparatus for treating substrateSEMES CO LTD·Filed 2021·Granted Feb 18, 2025·0 cites·8 claims
- 0451US2024222165A1Substrate treating apparatusSEMES CO LTD·Filed 2023·Application pending·0 cites
- 0550US12472596B2Support unit and substrate treating apparatus including the sameSEMES CO LTD·Filed 2022·Granted Nov 18, 2025·0 cites·18 claims
- 0650US2025062125A1Substrate processing method, manufacturing method, and substrate processing apparatusSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0749US2024231246A9Apparatus for treating a substrate and method for improving cooling efficiency thereofSEMES CO LTD·Filed 2023·Application pending·0 cites
- 0849US2024385524A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0949US2023408200A1Cooling module for baking device and substrate treating apparatus including the sameSEMES CO LTD·Filed 2023·Application pending·0 cites
- 1049US2025096007A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2024·Application pending·0 cites
- 1148US2024213059A1Substrate processing apparatus and methodSEMES CO LTD·Filed 2023·Application pending·0 cites
- 1247US12331399B2Apparatus for smoothly exhausting the atmosphere in a processing space when rotating a substrate with liquidSEMES CO LTD·Filed 2021·Granted Jun 17, 2025·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →