Inventor · disambiguated record
Henry K. Chau
Also filed as: CHAU HENRY K · CHAU HENRY KWOK PANG
6 granted patents·1 pending application·355 citations·filing 1996–2013
87Inventor score
Top patents by PatentIndex Score
7 records- 0192US5859698AMethod and apparatus for macro defect detection using scattered lightNIKON CORP·Filed 1997·Granted Jan 12, 1999·142 cites·20 claims
- 0287US5777729AWafer inspection method and apparatus using diffracted lightNIKON CORP·Filed 1996·Granted Jul 7, 1998·86 cites·40 claims
- 0384US5838448ACMP variable angle in situ sensorNIKON CORP·Filed 1997·Granted Nov 17, 1998·63 cites·26 claims
- 0478US6320345B1Command trajectory for driving a stage with minimal vibrationNIKON CORP·Filed 1998·Granted Nov 20, 2001·41 cites·34 claims
- 0576US6988060B1Alignment simulationNIKON CORP·Filed 2000·Granted Jan 17, 2006·16 cites·41 claims
- 0633US2013182235A1Measurement system that includes an encoder and an interferometerNIKON COPORATION·Filed 2013·Application pending·0 cites
- 0732US5936254AThin film detection method and apparatusNIKON RESEARCH CORP OF AMERICA·Filed 1997·Granted Aug 10, 1999·7 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →