Inventor · disambiguated record
Henry Guckel
Also filed as: GUCKEL HENRY
29 granted patents·3,932 citations·filing 1977–2001
98Inventor score
Top patents by PatentIndex Score
29 records- 0199US5190637AFormation of microstructures by multiple level deep X-ray lithography with sacrificial metal layersWISCONSIN ALUMNI RES FOUND·Filed 1992·Granted Mar 2, 1993·460 cites·21 claims
- 0298US5559358AOpto-electro-mechanical device or filter, process for making, and sensors made therefromHONEYWELL INC·Filed 1994·Granted Sep 24, 1996·532 cites·49 claims
- 0398US5206983AMethod of manufacturing micromechanical devicesWISCONSIN ALUMNI RES FOUND·Filed 1991·Granted May 4, 1993·179 cites·8 claims
- 0498US5188983APolysilicon resonating beam transducers and method of producing the sameWISCONSIN ALUMNI RES FOUND·Filed 1992·Granted Feb 23, 1993·179 cites·6 claims
- 0598US5090254APolysilicon resonating beam transducersWISCONSIN ALUMNI RES FOUND·Filed 1990·Granted Feb 25, 1992·162 cites·43 claims
- 0698US4744863ASealed cavity semiconductor pressure transducers and method of producing the sameWISCONSIN ALUMNI RES FOUND·Filed 1986·Granted May 17, 1988·189 cites·26 claims
- 0797US5644177AMicromechanical magnetically actuated devicesWISCONSIN ALUMNI RES FOUND·Filed 1995·Granted Jul 1, 1997·163 cites·30 claims
- 0897US4996082ASealed cavity semiconductor pressure transducers and method of producing the sameWISCONSIN ALUMNI RES FOUND·Filed 1989·Granted Feb 26, 1991·128 cites·12 claims
- 0997US4897360APolysilicon thin film processWISCONSIN ALUMNI RES FOUND·Filed 1987·Granted Jan 30, 1990·216 cites·16 claims
- 1097US4853669ASealed cavity semiconductor pressure transducers and method of producing the sameWISCONSIN ALUMNI RES FOUND·Filed 1988·Granted Aug 1, 1989·131 cites·13 claims
- 1196US5378583AFormation of microstructures using a preformed photoresist sheetWISCONSIN ALUMNI RES FOUND·Filed 1993·Granted Jan 3, 1995·203 cites·44 claims
- 1295US5866281AAlignment method for multi-level deep x-ray lithography utilizing alignment holes and postsWISCONSIN ALUMNI RES FOUND·Filed 1996·Granted Feb 2, 1999·136 cites·25 claims
- 1395US5576147AFormation of microstructures using a preformed photoresist sheetWISCONSIN ALUMNI RES FOUND·Filed 1995·Granted Nov 19, 1996·126 cites·16 claims
- 1495US5357807AMicromachined differential pressure transducersWISCONSIN ALUMNI RES FOUND·Filed 1992·Granted Oct 25, 1994·140 cites·19 claims
- 1595US5189777AMethod of producing micromachined differential pressure transducersWISCONSIN ALUMNI RES FOUND·Filed 1990·Granted Mar 2, 1993·94 cites·19 claims
- 1694US4203128AElectrostatically deformable thin silicon membranesWISCONSIN ALUMNI RES FOUND·Filed 1978·Granted May 13, 1980·122 cites·20 claims
- 1792US5908719ARadiation mask adapted to be aligned with a photoresist layer and method of making the sameWISCONSIN ALUMNI RES FOUND·Filed 1998·Granted Jun 1, 1999·88 cites·9 claims
- 1892US5496668AFormation of microstructures using a preformed photoresist sheetWISCONSIN ALUMNI RES FOUND·Filed 1994·Granted Mar 5, 1996·70 cites·16 claims
- 1991US5327033AMicromechanical magnetic devicesWISCONSIN ALUMNI RES FOUND·Filed 1992·Granted Jul 5, 1994·62 cites·13 claims
- 2089US5718618ALapping and polishing method and apparatus for planarizing photoresist and metal microstructure layersWISCONSIN ALUMNI RES FOUND·Filed 1996·Granted Feb 17, 1998·146 cites·40 claims
- 2186US4180771AChemical-sensitive field-effect transistorAIRCO INC·Filed 1977·Granted Dec 25, 1979·122 cites·10 claims
- 2282US6133615APhotodiode arrays having minimized cross-talk between diodesWISCONSIN ALUMNI RES FOUND·Filed 1998·Granted Oct 17, 2000·71 cites·36 claims
- 2380US5013693AFormation of microstructures with removal of liquid by freezing and sublimationWISCONSIN ALUMNI RES FOUND·Filed 1989·Granted May 7, 1991·52 cites·35 claims
- 2478US5808384ASingle coil bistable, bidirectional micromechanical actuatorWISCONSIN ALUMNI RES FOUND·Filed 1997·Granted Sep 15, 1998·47 cites·25 claims
- 2577US4234361AProcess for producing an electrostatically deformable thin silicon membranes utilizing a two-stage diffusion step to form an etchant resistant layerWISCONSIN ALUMNI RES FOUND·Filed 1979·Granted Nov 18, 1980·35 cites·10 claims
- 2671US6087743APosition control system for use with micromechanical actuatorsWISCONSIN ALUMNI RES FOUND·Filed 1998·Granted Jul 11, 2000·38 cites·10 claims
- 2770US4658279AVelocity saturated strain sensitive semiconductor devicesWISCONSIN ALUMNI RES FOUND·Filed 1983·Granted Apr 14, 1987·22 cites·28 claims
- 2859US6607305B2Bi-directional micromechanical latching linear actuatorWISCONSIN ALUMNI RES FOUND·Filed 2001·Granted Aug 19, 2003·6 cites·28 claims
- 2947US5679502AMethod and apparatus for micromachining using hard X-raysWISCONSIN ALUMNI RES FOUND·Filed 1995·Granted Oct 21, 1997·13 cites·46 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →