Inventor · disambiguated record
Henri A. Khoury
Also filed as: KHOURY HENRI A
7 granted patents·457 citations·filing 1983–1996
90Inventor score
Files withIBM7
Top patents by PatentIndex Score
7 records- 0196US4493745AOptical emission spectroscopy end point detection in plasma etchingIBM·Filed 1984·Granted Jan 15, 1985·106 cites·7 claims
- 0293US5298975ACombined scanning force microscope and optical metrology toolIBM·Filed 1991·Granted Mar 29, 1994·130 cites·29 claims
- 0384US5345816AIntegrated tip strain sensor for use in combination with a single axis atomic force microscopeIBM·Filed 1993·Granted Sep 13, 1994·45 cites·12 claims
- 0483US4659220AOptical inspection system for semiconductor wafersIBM·Filed 1984·Granted Apr 21, 1987·67 cites·3 claims
- 0580US5321977AIntegrated tip strain sensor for use in combination with a single axis atomic force microscopeIBM·Filed 1992·Granted Jun 21, 1994·45 cites·14 claims
- 0679US5585629AElectron beam nano-metrology systemIBM·Filed 1996·Granted Dec 17, 1996·36 cites·11 claims
- 0759US4600936AChip registration mechanismIBM·Filed 1983·Granted Jul 15, 1986·28 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →