Inventor · disambiguated record
Heewon Min
Also filed as: MIN HEEWON
2 granted patents·6 pending applications·0 citations·filing 2020–2024
22Inventor score
Files withSAMSUNG ELECTRONICS CO LTD8
Top patents by PatentIndex Score
8 records- 0157US2025379038A1Plasma etching apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0255US2025226187A1Substrate processing apparatus for etching a substrate by using plasmaSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0354US2024162014A1Process chamber, substrate treating apparatus including the same, and operating method of the substrate treating apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0453US2024100639A1Electrostatic chuckSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0553US2024162017A1Substrate supporting device, a substrate processing apparatus including the same, and a substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0645US2025054733A1Apparatus for processing a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0742US11404252B2Electrostatic chuck and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Aug 2, 2022·0 cites·11 claims
- 0841US11984344B2Lift apparatus and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted May 14, 2024·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →