Inventor · disambiguated record
He Hui Peng
Also filed as: PENG HE HUI
14 granted patents·3 pending applications·28 citations·filing 2011–2023
86Inventor score
Top patents by PatentIndex Score
17 records- 0194US9630295B2Mechanisms for removing debris from polishing padTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Apr 25, 2017·25 cites·20 claims
- 0281US11996283B2Method for metal gate surface cleanTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted May 28, 2024·0 cites·20 claims
- 0378US10875148B2Apparatus and methods for chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 29, 2020·2 cites·18 claims
- 0474US11410846B2Method for metal gate surface cleanTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 9, 2022·0 cites·20 claims
- 0570US9269585B2Method for cleaning metal gate surfaceTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Feb 23, 2016·1 cites·20 claims
- 0668US2023211452A1Wafer polishing head, system thereof, and method using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0765US11772227B2Device and methods for chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Oct 3, 2023·0 cites·20 claims
- 0864US11602821B2Wafer polishing head, system thereof, and method using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 14, 2023·0 cites·20 claims
- 0963US11999027B2Method for polishing semiconductor substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 4, 2024·0 cites·20 claims
- 1061US9723915B2Brush cleaning methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Aug 8, 2017·0 cites·20 claims
- 1160US10847359B2Method for metal gate surface cleanTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Nov 24, 2020·0 cites·20 claims
- 1258US9633832B2Method for metal gate surface cleanTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Apr 25, 2017·0 cites·20 claims
- 1354US9119464B2Brush cleaning systemHUANG FU-MING·Filed 2012·Granted Sep 1, 2015·0 cites·20 claims
- 1448US10875143B2Apparatus and methods for chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 29, 2020·0 cites·20 claims
- 1540US2015107619A1Wafer particle removalTAIWAN SEMICONDUCTOR MFG·Filed 2013·Application pending·0 cites
- 1632US8703612B2Process for forming contact plugsSUEN SHICH-CHANG·Filed 2011·Granted Apr 22, 2014·0 cites·20 claims
- 1731US2013061876A1Semiconductor Device Surface CleanSUEN SHICH-CHANG·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →