Inventor · disambiguated record

Heike Scholtz

Also filed as: SCHOLTZ HEIKE

1 granted patent·1 citations·filing 2011–2011

15Inventor score

Technology areasG03F

Files withPOOCK ANDRE1

Top patents by PatentIndex Score

1 record

0146US8660681B2Method and system for excursion monitoring in optical lithography processes in micro device fabricationPOOCK ANDRE·Filed 2011·Granted Feb 25, 2014·1 cites·17 claims

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Heike Scholtz — Patent Inventor | PatentIndex