Inventor · disambiguated record
Heinz Siegert
Also filed as: SIEGERT HEINZ
2 granted patents·4 citations·filing 1999–2001
49Inventor score
Technology areasG03F
Files withSAL INC1
Top patents by PatentIndex Score
2 records- 0146US6845145B2Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devicesSAL INC·Filed 2001·Granted Jan 18, 2005·3 cites·36 claims
- 0222US6295332B1Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devicesFiled 1999·Granted Sep 25, 2001·1 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →