Inventor · disambiguated record
Henry I. Smith
Also filed as: AUSTIN STEWART S · FLANDERS DALE C · SMITH HENRY I · SMITH HENRY IGNATIUS
52 granted patents·3 pending applications·2,408 citations·filing 1975–2016
99Inventor score
Files withMASSACHUSETTS INST TECHNOLOGY45EISLER HANS J1IBM1LUCENT TECHNOLOGIES INC1MASSASCUSETTS INST OF TECHNOLO1
Top patents by PatentIndex Score
55 records- 0198US4200395AAlignment of diffraction gratingsMASSACHUSETTS INST TECHNOLOGY·Filed 1977·Granted Apr 29, 1980·208 cites·41 claims
- 0296US6522411B1Optical gap measuring apparatus and method having two-dimensional grating mark with chirp in one directionMASSACHUSETTS INST TECHNOLOGY·Filed 2000·Granted Feb 18, 2003·108 cites·17 claims
- 0396US5808742AOptical alignment apparatus having multiple parallel alignment marksMASSACHUSETTS INST TECHNOLOGY·Filed 1996·Granted Sep 15, 1998·197 cites·15 claims
- 0496US4890309ALithography mask with a π-phase shifting attenuatorMASSACHUSETTS INST TECHNOLOGY·Filed 1987·Granted Dec 26, 1989·133 cites·18 claims
- 0596US4256787AOrientation of ordered liquids and their use in devicesMASSACHUSETTS INST TECHNOLOGY·Filed 1978·Granted Mar 17, 1981·78 cites·28 claims
- 0695US5900637AMaskless lithography using a multiplexed array of fresnel zone platesMASSACHUSETTS INST TECHNOLOGY·Filed 1997·Granted May 4, 1999·137 cites·30 claims
- 0795US5414514AOn-axis interferometric alignment of plates using the spatial phase of interference patternsMASSACHUSETTS INST TECHNOLOGY·Filed 1993·Granted May 9, 1995·273 cites·18 claims
- 0895US4360586ASpatial period division exposingMASSACHUSETTS INST TECHNOLOGY·Filed 1980·Granted Nov 23, 1982·95 cites·8 claims
- 0995US4340305APlate aligningMASSACHUSETTS INST TECHNOLOGY·Filed 1979·Granted Jul 20, 1982·74 cites·3 claims
- 1094US6088103AOptical interference alignment and gapping apparatusMASSACHUSETTS INST TECHNOLOGY·Filed 1998·Granted Jul 11, 2000·118 cites·62 claims
- 1194US5915051AWavelength-selective optical add/drop switchMASSASCUSETTS INST OF TECHNOLO·Filed 1997·Granted Jun 22, 1999·305 cites·28 claims
- 1292US5142385AHolographic lithographyMASSACHUSETTS INST TECHNOLOGY·Filed 1991·Granted Aug 25, 1992·101 cites·12 claims
- 1389US7667819B2System and method for contrast enhanced zone plate array lithographyMASSACHUSETTS INST TECHNOLOGY·Filed 2005·Granted Feb 23, 2010·10 cites·14 claims
- 1488US7714988B2System and method for absorbance modulation lithographyMASSACHUSETTS INST TECHNOLOGY·Filed 2006·Granted May 11, 2010·8 cites·13 claims
- 1587US7713684B2System and method for absorbance modulation lithographyMASSACHUSETTS INST TECHNOLOGY·Filed 2008·Granted May 11, 2010·7 cites·4 claims
- 1687US7150910B2Nanocrystal structuresMASSACHUSETTS INST TECHNOLOGY·Filed 2002·Granted Dec 19, 2006·33 cites·12 claims
- 1785US7666580B2System and method for contrast enhanced zone plate array lithographyMASSACHUSETTS INST TECHNOLOGY·Filed 2008·Granted Feb 23, 2010·6 cites·3 claims
- 1885US5892230AScintillating fiducial patternsMASSACHUSETTS INST TECHNOLOGY·Filed 1997·Granted Apr 6, 1999·48 cites·33 claims
- 1985US3984680ASoft X-ray mask alignment systemMASSACHUSETTS INST TECHNOLOGY·Filed 1975·Granted Oct 5, 1976·31 cites·8 claims
- 2084US7470473B2Nanocrystal structuresMASSACHUSETTS INST TECHNOLOGY·Filed 2006·Granted Dec 30, 2008·8 cites·6 claims
- 2183US5122223AGraphoepitaxy using energy beamsMASSACHUSETTS INST TECHNOLOGY·Filed 1984·Granted Jun 16, 1992·24 cites·2 claims
- 2282US7417234B2Spatial-phase locking of energy beams for determining two-dimensional location and beam shapeMASSACHUSETTS INST TECHNOLOGY·Filed 2005·Granted Aug 26, 2008·7 cites·67 claims
- 2381US5136169AEnergy beam locatingMASSACHUSETTS INST TECHNOLOGY·Filed 1991·Granted Aug 4, 1992·41 cites·50 claims
- 2481US4479846AMethod of entraining dislocations and other crystalline defects in heated film contacting patterned regionMASSACHUSETTS INST TECHNOLOGY·Filed 1982·Granted Oct 30, 1984·48 cites·13 claims
- 2580US6894292B2System and method for maskless lithography using an array of sources and an array of focusing elementsMASSACHUSETTS INST TECHNOLOGY·Filed 2003·Granted May 17, 2005·15 cites·14 claims
- 2680US4370194AOrientation of ordered liquids and their use in devicesMASSACHUSETTS INST TECHNOLOGY·Filed 1980·Granted Jan 25, 1983·35 cites·15 claims
- 2778US7193782B2System and method for manipulating micro-particles using electromagnetic fieldsMASSACHUSETTS INST TECHNOLOGY·Filed 2003·Granted Mar 20, 2007·19 cites·24 claims
- 2877US4254174ASupported membrane composite structure and its method of manufactureMASSACHUSETTS INST TECHNOLOGY·Filed 1979·Granted Mar 3, 1981·23 cites·2 claims
- 2975US6960773B2System and method for maskless lithography using an array of improved diffractive focusing elementsMASSACHUSETTS INST TECHNOLOGY·Filed 2003·Granted Nov 1, 2005·13 cites·15 claims
- 3075US6404481B1Adaptive lithography membrane masksUNIV LOUISIANA STATE·Filed 2000·Granted Jun 11, 2002·14 cites·19 claims
- 3175US4333792AEnhancing epitaxy and preferred orientationMASSACHUSETTS INST TECHNOLOGY·Filed 1979·Granted Jun 8, 1982·26 cites·38 claims
- 3273US5014360ARemoving perspirationSMITH EILEEN M·Filed 1990·Granted May 14, 1991·59 cites·16 claims
- 3370US8143601B2Nanoscale imaging via absorption modulationMENON RAJESH·Filed 2008·Granted Mar 27, 2012·3 cites·24 claims
- 3468US5809103AX-ray lithography maskingMASSACHUSETTS INST TECHNOLOGY·Filed 1996·Granted Sep 15, 1998·28 cites·22 claims
- 3565US6822248B2Spatial phase locking with shaped electron beam lithographyIBM·Filed 2001·Granted Nov 23, 2004·13 cites·20 claims
- 3664US8121162B2Nanocrystal structuresEISLER HANS J·Filed 2008·Granted Feb 21, 2012·2 cites·9 claims
- 3763US4170512AMethod of manufacture of a soft-X-ray maskMASSACHUSETTS INST TECHNOLOGY·Filed 1977·Granted Oct 9, 1979·15 cites·17 claims
- 3860US9359198B2Carrier-substrate adhesive systemMASSACHUSETTS INST TECHNOLOGY·Filed 2014·Granted Jun 7, 2016·1 cites·30 claims
- 3959US7160673B2System and method for holographic fabrication and replication of diffractive optical elements for maskless lithographyMASSACHUSETTS INST TECHNOLOGY·Filed 2003·Granted Jan 9, 2007·4 cites·19 claims
- 4059US4576676AThick crystalline films on foreign substratesMASSACHUSETTS INST TECHNOLOGY·Filed 1983·Granted Mar 18, 1986·10 cites·6 claims
- 4154US7148496B2System and method for proximity effect correction in imaging systemsMASSACHUSETTS INST TECHNOLOGY·Filed 2004·Granted Dec 12, 2006·3 cites·20 claims
- 4250US7304318B2System and method for maskless lithography using an array of sources and an array of focusing elementsMASSACHUSETTS INST TECHNOLOGY·Filed 2005·Granted Dec 4, 2007·0 cites·20 claims
- 4349US7303860B1System and method for performing multi-resolution lithographyMASSACHUSETTS INST TECHNOLOGY·Filed 2002·Granted Dec 4, 2007·3 cites·20 claims
- 4447US7348104B2System and method for fabrication and replication of diffractive optical elements for maskless lithographyMASSACHUSETTS INST TECHNOLOGY·Filed 2003·Granted Mar 25, 2008·1 cites·20 claims
- 4544US10046550B2Carrier-substrate adhesive systemMASSACHUSETTS INST TECHNOLOGY·Filed 2016·Granted Aug 14, 2018·0 cites·37 claims
- 4644US7405806B2Imaging system and method employing beam foldingMASSACHUSETTS INST TECHNOLOGY·Filed 2005·Granted Jul 29, 2008·0 cites·18 claims
- 4742US2006186355A1Phase-shift masked zone plate array lithographySMITH HENRY I·Filed 2006·Application pending·0 cites
- 4841US4565599AGraphoepitaxy by encapsulationMASSACHUSETTS INST TECHNOLOGY·Filed 1984·Granted Jan 21, 1986·9 cites·7 claims
- 4939US4075706ASurface wave devices for processing signalsMASSACHUSETTS INST TECHNOLOGY·Filed 1976·Granted Feb 21, 1978·2 cites·7 claims
- 5037US2004037503A1Optical waveguide with non-uniform sidewall gratingsFiled 2003·Application pending·0 cites
Showing the top 50 of 55 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →