Inventor · disambiguated record
Hironobu Fujishima
Also filed as: FUJISHIMA HIRONOBU
6 granted patents·2 pending applications·9 citations·filing 2010–2024
72Inventor score
Top patents by PatentIndex Score
8 records- 0191US11231573B2Position detection apparatus, exposure apparatus, and article manufacturing methodCANON KK·Filed 2020·Granted Jan 25, 2022·3 cites·12 claims
- 0284US10747116B2Pattern forming apparatus and article manufacturing methodCANON KK·Filed 2019·Granted Aug 18, 2020·3 cites·23 claims
- 0377US8502962B2Computer readable storage medium including effective light source calculation program, and exposure methodKAWASHIMA MIYOKO·Filed 2010·Granted Aug 6, 2013·3 cites·11 claims
- 0463US2025004388A1Exposure apparatus, control method, and method of manufacturing articleCANON KK·Filed 2024·Application pending·0 cites
- 0561US12405538B2Calibration method, detection system, exposure apparatus, article manufacturing method, and non-transitory computer-readable storage mediumCANON KK·Filed 2023·Granted Sep 2, 2025·0 cites·12 claims
- 0658US12429795B2Detection apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2023·Granted Sep 30, 2025·0 cites·14 claims
- 0744US10545415B2Detection apparatus, pattern forming apparatus, obtaining method, detection method, and article manufacturing methodCANON KK·Filed 2018·Granted Jan 28, 2020·0 cites·20 claims
- 0844US2015124073A1Illumination optical system and microscopeCANON KK·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →