Inventor · disambiguated record
Hitoshi Hatada
Also filed as: HATADA HITOSHI
4 granted patents·456 citations·filing 2001–2021
71Inventor score
Top patents by PatentIndex Score
4 records- 0197US6811953B2Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdeviceNIKON CORP·Filed 2001·Granted Nov 2, 2004·456 cites·23 claims
- 0261US12498553B2Microscope objective lens, microscope optical system, and microscope deviceNIKON CORP·Filed 2021·Granted Dec 16, 2025·0 cites·15 claims
- 0338US8130364B2Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing methodKUMAZAWA MASATO·Filed 2007·Granted Mar 6, 2012·0 cites·21 claims
- 0430US8427628B2Exposure apparatus, exposure method and device fabricating methodHATADA HITOSHI·Filed 2010·Granted Apr 23, 2013·0 cites·34 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →